三氧化鎢薄膜臭氧氣體感測器之感測性能與室內空氣品質之有效通風研究

本研究利用微機電（Micro-Electro-Mechanical Systems，MEMS）製程製作臭氧(Ozone)氣體感測器，其結構包含三氧化鎢（WO3）感測層、白金（Pt）加熱器及指叉電極。利用濺渡沉積三氧化鎢薄膜，經由退火處理來得到較為完整之結構，並用蒸鍍方式製作白金加熱器及指叉電極。本研究所製成之微型感測器原型在250℃、300℃及350℃不同工作溫度下測試其濃度與感測層電阻間相互之關係及感測器靈敏度，並討論其結果。而現代人大量使用影印機、列表機造，均會產生許多新的室內空氣污染源，長期下來的結果，由於室內空氣品質不佳，對人體健康造成不同層面的影響如病態大樓症候群(Sick Building Syndrome)以及各種建築相關疾病（Building Related Illness，BRI）。本文運用計算流體力學對室內氣流與通風進行數值模擬，得到室內各個位置的風速和污染物濃度等參數，分析新風量對室內臭氧濃度的影響。

關鍵字

三氧化鎢；微機電製程；氣體感測器；室內空氣品質；數值模擬分析

並列摘要

This paper describes the preparation of tungsten trioxide（WO3）thin films by the reactive RF magnetron sputter for the ozone sensor. The primary deposition parameters that influence the microstructure, chemical and electrical properties of WO3 thin films formed by reactive magnetron sputtering are substrate temperature, Ar/O2 concentration ratio, total pressure, and RF power. The films are then stabilized by annealing in dry air. The platinum catalytic filter was developed to enhance the sensitivity of tungsten trioxide to benzene. The characteristics of its structural properties were presented by means of XRD measurements and the film morphology by the SEM microscope. The sensors were operated at the temperature range from 250 to 350℃ to analyze the effect of working temperature on their response. On the other hand, at modern time use of the photogravure press, tabulating machine and other business machines produce a lot of new indoor air pollution and cause the influence of the different aspects on the health. The result that comes down for a long time, because indoor air quality is bad, causes the sick building syndrome (SBS) and building related illness. In ventilated interior environments of buildings, the determination of air-flow velocities, temperatures and concentrations of pollutants is required to evaluate comfort conditions and indoor air quality. This thesis also investigates the effective ventilation by computational fluid dynamics（CFD）methods. The indoor air quality is determined by computing the mean age of air and concentration of ozone in a specified office. The results from the present study can be used to manufacture a practical MEMS-based ozone sensor and corporate it into the building HVAC control system for the effective ventilation in impelling the ozone pollution.

並列關鍵字

WO3 ； Indoor air Quality ； VOCs ； computational fluid dynamics ； Ozone

參考文獻

[3] 郭育良、胡淑貞、李惠玲，「排列致癌物可能危險性以擬管理優先順序之模式」，中華衛誌，第l11 卷，第3 期，249-266，1992。

[4] 劉紹興、徐尚為、林春蓮、陳麗美，「監測人類致癌物暴露的分子流行病學方法」，國防醫學，第16 卷，第5 期，451-461，1993a。

[1] Spengler, J.D., and K.Sexton “Indoor Air Pollution: A public health perspective”. ScienceVol. 121:p.9-17 ,1983

[2] Heinsohn, Robert Jenings., Cimbala, John M., “Indoor Air Quality Engineering”, New York : Basel : Marcel Dekker, pp.346-347, 2003

[7] Brooks, B.O., G.M. Utter, J.A. Debory and R.D. Schimke, “Indoor Air Pollution: AnEdifice Complex”, Clinical Toxicology, 1991.

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三氧化鎢薄膜臭氧氣體感測器之感測性能與室內空氣品質之有效通風研究

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