類鑽碳薄膜擁有許多良好的性質,例如高光穿透性、高硬度、高熱傳導性、高化學穩定性與低摩擦係數等。本研究利用R.F.非平衡磁控濺鍍系統沉積無氫、有氫與含鈦類鑽碳薄膜。討論製程中不同工作壓力、甲烷比例與鈦靶材濺鍍功率對薄膜之表面結構、內部sp3/sp2比例、表面粗糙度、潤濕性、光學穿透性、化學惰性等薄膜特性;並接著比較無氫、有氫與含鈦類鑽碳薄膜之生物相容性與血液相容性。 本研究在生物實驗上利用MG63細胞、PC12細胞與Hela細胞個別當作骨元、神經元與表皮細胞元。藉由將上述三種細胞個別培養於Si基板、Ti6Al4V基板、PET基板以及類鑽碳薄膜系列上,觀察其細胞附著、生長與毒殺性。觀察比較發現,MG63細胞與Hela細胞在無氫及有氫類鑽碳薄膜與摻鈦類鑽碳薄膜上生長,皆有較多的細胞數目;而PC12細胞只會附著於有氫類鑽碳薄膜。在血液相容性上,無氫及有氫類鑽碳薄膜與摻鈦類鑽碳薄膜皆與現今所使用的Ti6Al4V一樣,不會對紅血球造成毒殺性,且在摻鈦類鑽碳薄膜擁有較好的抗凝血效果。在抗菌實驗上,無氫及含鈦類鑽碳薄膜上皆有比其他材料還要少的大腸桿菌數目。
Diamond-like carbon (DLC) films are the best materials for many applications due to their high hardness, optical transparency, electrical resistance, chemical inertness, and low coefficient of friction. Also, it is well known that modified DLC films with doped elements would enhance those characteristics mentioned above, especially ensure high bio/haemo-compatiblility. In this study, H-free, hydrogenated and titanium-doped DLC thin films were deposited onto silicon, Polyethylene terephthalate (PET) and Ti6Al4V substrate by R.F. unbalance magnetron sputtering technique. It is shown that the experiment parameters had significant effects on surface microstructure, roughness, wettability, optical transparency, chemical inertness, biocompatibility and haemocompatiblility. In bio-tests, MG63 cell, PC12 cell and Hela cell were cultured on substrates of Si、Ti6Al4V、PET and DLC thin films. The vitro tests revealed that MG63 and Hela cell had a higher number of cells grown on the DLC thin films, and PC12 cell just grown on hydrogenated DLC thin film. The haemo tests showed that DLC thin films had no cytotoxicity, and they both had excellent anticoagulatory effect. In antibacterial test, H-free and titanium-doped DLC thin film had a fewer amount of colon bacillus attached than other materials.