低同調光源角度干涉儀之研發

Developments of low-coherent light source angular interferometers

張建偉(Chien-Wei Chang)

指導教授 ： 林世聰

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2008年)

摘要

本論文提出兩套干涉儀，它們都是使用低同調光源及角度掃描技術來量測絕對角度位移。第一套是用兩相同偏極橫向分光鏡所構成之干涉儀，當其中一分光鏡產生角位移，Correlogram便產生位移，因此偵測此位移量便得知其角位移。第二套是以一分光鏡、一方形稜鏡及一平面鏡所構成之干涉儀，當方形稜鏡產生角位移，Correlogram也產生平移，偵測此位移量便可得知其角位移。
我們實際架設出這兩套干涉儀，第一套有0.093arc-sec及309320(rad./rad.)之解析度及靈敏度，而第二套有0.093arc-sec及322705(rad./rad.)之解析度及靈敏度。最後我們拿這兩套系統進行實驗量測，結果驗證了它們的正確與可應用性。

關鍵字

白光 ； 干涉儀 ； 絕對角度位移

並列摘要

Two interferometers based on using low-coherent light source and angular scanning are proposed for absolute angular displacement determinations in this thesis.
The first interferometer comprises two the identical polarized lateral beam-splitters(PLBS1 and PLBS2).An angular displacement of one of the polarized lateral beam-splitters modulates the interference signal to a pattern with an envelope function (Correlogram). The angular displacement can thus examined by retrieving the position of the envelope peak. The second interferometer comprises a beam-splitter (BS), square prism (SP), and mirror. An angular displacement of the square prism modulates the interference signal generated by the beams passing through the prism to a pattern with an envelope function. The angular displacement can thus examined by retrieving the position of the envelope peak.
Two setups constructed to realize the interferometer and the results of using the two setups are demonstrated and presented. The theory of first interferometer was demonstrated and the setup with a measurement resolution and sensitivity of 0.093 arc-sec and 309320 rad./rad., respectively, was presented. And the resolution and sensitivity of the other setup were also examined and were 0.093 arc-sec and 309320 rad./rad., respectively.
The experimental results from the uses of the two setups were exhibited. The results agreed the validity and applicability of the two sets of interferometer.

並列關鍵字

white light ； interferometer ； absolute angular displacement

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