非單向流型潔淨室空氣置換量與室內氣懸微粒濃度特性分析及節能潛力探討

Study on the influence of Room Air Change Rates on the particle concentrations and the potential of energy saving in non-unidirectional Cleanrooms

李仲杰(Chung -Chieh Lee)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2010年)

摘要

本研究主要探討潔淨室換氣次數(Air Change Rate, ACR)與室內氣懸微粒濃度(Indoor airborne particle concentrations)之間的關係，考慮微環境設備(Mini-Environment)濾淨室內氣懸微粒的能力，推導一個新的室內氣懸微粒計算模型；並以實驗量測室內氣懸微粒濃度(Indoor airborne particle concentration)並計算污染物去除效率(Contaminant Removal Effectiveness, CRE)。本研究探討(1)不同潔淨室換氣次數和開口高架地板覆蓋率時，室內氣懸微粒的排除能力、(2)不同置換風量對於生產區域微環境的影響、(3)當室內氣懸微粒濃度過度設計(over design)時調降置換風量的可行性及節能潛力評估。研究結果顯示：(1)換氣次數(ACR)和開口高架地板覆蓋率(β)與室內氣懸微粒濃度(Ci/Cso )的關係可表示為Ci/Cso = 0.000033ACR2-0.0000915β2 -0.00818ACR-0.00775β+ 0.65 、(2) 換氣次數(ACR)和開口高架地板覆蓋率(β)與污染物去除效率(CRE)的關係可表示為CRE=-0.00021ACR2-0.00021β2 +0.054ACR-0.0245β-2.8653 、(3) 不同置換風量對於生產區域微環境的室內氣懸微粒濃度及氣流偏斜角並無明顯的影響、(4)當換氣次數由146 times/hr調降至92 times/hr，開口高架地板覆蓋率從24%增加至48%時，可節省再循環風機耗能40%，對於室內氣懸微粒濃度並無明顯的影響。

關鍵字

潔淨室 ； 換氣次數 ； 室內氣懸微粒濃度 ； 污染物去除效率

並列摘要

This study investigated relationship between the indoor airborne particle concentrations and Air Change Rates (ACR) of a Cleanrooms, and derivation a new computational model of indoor airborne particles, which containing the filtration of the micro-environment equipment (Mini-Environment). Experiments where conducted the to measure the indoor airborne particle concentrations and calculate contaminant removal effectiveness(CRE) of the Cleanrooms, The followings where examined :(1) The CRE at various ACR and coverage rates of perforated raised floor panel (2) the influence of ACR on the Mini-Environment, (3) When over design of the Cleanrooms, the feasibility of lowing ACR and assessment of energy saving potential. The results showed: (1) the ACR, and the coverage ratio of the perforated raised floor β, and the averaged room particle concentration (Ci/Cso) can be expressed as follows : 0.000033ACR2-0.0000915β2 -0.00818ACR-0.00775β+ 0.65 , (2) the ACR, and the β, and the averaged room CRE can be expressed as follows : CRE=-0.00021ACR2-0.00021β2 +0.054ACR-0.0245β-2.8653 , (3) the influence of various ACRs on the regional Mini-Environment was insignificant , ( 4) When reducing the ACR from 146 times / hr to 92 times / hr, and increasing the βfrom 24% to 48%, the Cleanrooms benefited a energy savings of 40% at the design indoor airborne particle concentrations.

並列關鍵字

Cleanrooms ； Air Change Rates ； Indoor airborne particle concentration ； CRE

參考文獻

[2] S. Murakami, Y. Suyama, "Numerical and experimental study on turbulent diffusion fields in conventional flow type clean rooms," ASHRAE Transactions, vol. 94, pp. 469-493, 1988.

[6] Hu, S. C., Wu, Y. Y., Liu, C. J., 1996, “Measurement of Air Flow Characteristics in A Full-scale Clean Room,” Building and Environment, Vol. 31, No. 2, pp. 119-128.

[7] Chen M, Liu GR, Lam KY, Cai WJ, Lee EL, “Approaches for improving airflow uniformity in unidirectional flow cleanrooms,” Building and Environment, Vol.34 , 1999 , pp.275–284.

[8] Hu SC, Chuah YK, “Deterministic simulation and assessment of air-recirculation performance of unidirectional-flow cleanrooms that incorporate age of air concept,” Building and Environment, Vol. 38, 2003, pp.563–570.

[10] S. H. Ho et al.,” Three-dimensional analysis for hospital operating room thermal comfort and contaminant removal,” Applied Thermal Engineering, 2009.