- 學位論文
新型式三叉式微感測探頭於微型三次元量測機之量測行為探討
Developing a new type electronic-trigger signal probing head for micro-CMM
摘要
三次元量測機( Coordinate Measuring Machine, CMM )已廣泛應用於微型元件及零組件的三維座標及幾何形貌量測。然而微三次元量測機因微細球狀探針之加工成形問題及微感測方式的製作困難，現階段並無法量測尺寸在微米級以下之微細零組件。為了解決微小工件量測及外觀輪廓的建構問題，整合雷射、光電技術等各種新型式感測器已逐漸應用於微三次元量測探頭上。然而這些商用型微三次元量測探頭，由於精密的感測結構複雜及製程困難而且價格昂貴，目前仍無法使用於微細零件之量測機台上。故本研究主要開發結構簡單且成本低之微感測系統，此新型之三叉式機械式電觸發感測系統，包含支撐線、感測線和微細球狀探針，利用三條細絲線支撐金屬平板形成一個三懸臂樑結構，並且於平板中央位置黏著微細球探針，三條支撐線分別垂直交叉固定於三條感測線下方，因此支撐線和感測線保持一個點對點接觸狀態，就猶如三組on-off開關。當微細球狀探針觸及待測物時，金屬平板會產生微細震動造成on-off開關瞬間變化而擷取信號。在Z軸同點反覆感測實驗中，本研究量測機台同點反覆50次量測，其標準差約0.09μm左右，而微三叉式感測探頭架裝於量測機台上，其量測標準偏差約0.19μm以內，由此實驗結果得知本研究所提之機械式電觸發感測系統其重複性可達微米之需求，而且探頭製作價格低廉，未來將應用於微三次元量測探頭上。
並列摘要
Micro coordinate measuring machine (CMM) is widely used to measure three dimensional geometry and profile of micro-components and micro objects. However, micro CMM has still some limitations on micro components geometric measurement. In order to measure profile of micro products, various types of CMM’s probing heads such as combination laser, optical and piezo sensors were developed to resolve these critical measuring problems. However, these commercial micro probing heads of micro CMM are damaged easily and high-cost due to their complicated and delicate sensing structures. To achieve low-cost and high accuracy of micro products metrology, a novel electronic-trigger mechanical sensor was developed for micro CMM’s tactile probing head in this study. The new structure consists of supporting-wire, sensing-rod and micro ball-ended styli tip. Thin metal plate was supported by three micro wires such as triskelion structure and micro ball-ended styli tip was glued onto the plate center point. Three sensing-rod wires are fixed beneath the supporting wires respectively. Therefore, supporting and sensing-rod wires keep a point-to-point contact like three on-off switches. The experimental results show that electronic-trigger signal could be picked up even small vibration of the styli. The repeatibility and sensing behaviors of this novel mechanical sensor were also investigated in this study. It is expected that the low-cost electronic-trigger sensor could be applied on micro CMM’s tactile probing head in the near future.