雷射劃線光束調製技術運用在軟性銀膠基板之研究

Laser scribing with beam shaping technology on silver flexible substrate

李祐昌(You-Chang Lee)

指導教授 ： 莊賀喬

國立臺北科技大學/機電學院/機電整合研究所/碩士(2013年)

摘要

雷射光束大部分多以高斯分佈型態出現，由於光束的能量分佈不均(中強邊弱)，不適合雷射加工所使用，所以衍生了需多雷射光束整型(Beam shaping)的研究。在本研究中雷射劃線的樣品為Ag (Silver) / PET (Polyethylene terephthalate) 薄膜，在雷射波長532nm的奈秒雷射劃線Ag/PET薄膜時可以產生U型的工件剖面，但是在同樣波長的皮秒雷射加時卻產生V型的工件剖面，這是因為雷射脈衝時間的差異所造成的結果。
為了讓皮秒雷射在雷射劃線於Ag/PET薄膜之後也可以產生相同的U型工件剖面，因此本研究採用了光束整型器(Beam shaper)來獲得平頂光束(Top-hat beam)，此光束整型器是運用了光學繞射(Diffraction)效應改變雷射高斯光束的分佈以達到平頂光束的效果。
本研究運用光形檢測器(Laser beam profiler)分析檢測雷射光束剖面能量分佈，再利用金相顯微鏡(Metallurgical microscope)檢驗樣品剖面形狀，以雷射掃描共軛焦顯微鏡(Confocal Laser Scanning Microscope)測量並紀錄劃線加工後樣品剖面形狀。本研究證實皮秒雷射加入光束整型器後，可使雷射劃線於Ag/PET薄膜樣品上的V型剖面轉換成U型剖面，並成功的減少底層材料(PET)的損傷與增加上層材料(Ag)的強度，讓雷射劃線的加工運用更加廣泛。

關鍵字

光束整型(Beam shaping) ； 平頂光束(Top-hat beam) ； 皮秒雷射(Picosecond laser) ； Ag/PET薄膜

並列摘要

The profile of laser beam is generally a function of Gaussian distribution. The most laser energy concentrates in the middle of the beam. Therefore many studies are concerning on the laser beam shaping technology nowadays. In this study we presents the laser scribing experiments on Ag/PET film and a green nanosecond laser is used to make a cross-sectional U-type profile on the substrate. However, if a picosecond laser is used for scribing experiments, it causes a V-type profile under the same conditions due to the differences between the pulse widths of laser beam.
To achieve cross-sectional U-type profile on the substrate by using a green picosecond laser, a beam shaper is used in this study. The Gaussian beam of the laser is changed the Top-hat beam based on the diffraction effect.
In test, the laser beam is analyzed by a laser beam profiler and the cross-sectional profiles of samples are observed through a metallurgical microscope. The scribed samples are also measured by a confocal laser scanning microscope. Finally, a cross-sectional U-type profile on the Ag/PET substrate is successfully scribed a picosecond laser with a beam shaper, and thus reduces the material removing of PET and increases strength of silver.

並列關鍵字

Beam shaping ； Top-hat beam ； Picosecond laser ； Ag/PET thin film

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