高折射率對比光波導結構之製作與改良

Fabrication and Improvement of High-Index-Contrast Waveguide Structures

盧鎮遠(Jen-Yuan Lu)

指導教授 ： 王子建

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2012年)

摘要

本論文研究製作兩種高折射率對比光波導，藉由製程技術，改善氧化鈦光波導與鈮酸鋰脊形光波導的傳輸損耗。氧化鈦薄膜具有高折射率、高介電常數、化學性質穩定、硬度高、耐磨性佳、及在可見光與近紅外光區不吸收等特點。濺鍍氧化鈦薄膜時，通入5%的氧氣流量，製作厚度74nm、寬度3∼12μm的氧化鈦光波導，在波長632.8nm下，可傳導TE模態；濺鍍氧化鈦薄膜時，通入3%的氧氣流量，製作厚度210nm的氧化鈦光波導，在波長1550nm下，當寬度大於6μm時，可同時傳導TE與TM模態。
當物質接近熔點時，會使物體表面具流動性，可用修飾基板表面，降低表面的粗糙度，以減少光波在波導中傳播時的散射損失。本論文探討在高溫1120℃下，在鈮酸鋰脊形結構上進行熱流1hr、3hr及5hr，並與未熱流之鈮酸鋰作比較。實驗結果顯示，熱流1hr的鈮酸鋰光波導比未熱流的鈮酸鋰光波導之TE與TM極化光傳播損失分別減少了0.23dB/cm和2.23dB/cm，這對於降低鈮酸鋰光波導的傳輸損失將有很大的助益，未來可將此製程的方法應用在其他元件製作上。

關鍵字

光波導 ； 氧化鈦 ； 玻璃 ； 鈮酸鋰

並列摘要

The present paper researched two kinds of high refractive index contrast waveguide. Titanium dioxide waveguide and lithium niobate ridge waveguide improve the transmission loss by process technology. Titanium dioxide thin film have high refractive index, high dielectric constant, chemical stability, high hardness, hard-wearing, and the film does not absorb in the visible and near infrared region. Titanium dioxide films prepared by magnetron sputtering in flow of 5％ oxygen gas to product of the thickness of 74nm, width of 3∼12μm titanium dioxide waveguide. Under the wavelength of 632.8nm, can be conduction the TE mode. Titanium dioxide films prepared by magnetron sputtering in flow of 3％ oxygen gas to product of the thickness of 210nm. Under the wavelength of 1550nm, can be conduct both the TE and TM modes when the width is greater than 6μm.
When the material close to the melting point, can make the surface liquidity, and the modified surface roughness can be used in order to reduce the scattering losses in the waveguide transmission. The present paper investigated the high temperature 1120℃, the ridge structure of lithium niobate thermal-flow 1hr, 3hr, and 5hr, and not heat the lithium niobate for comparison. The experimental results proved thermal-flow 1hr than not thermal-flow lithium niobate optical waveguide propagation loss were reduced 0.23dB/cm and 2.23dB/cm of TE polarization and TM polarization. There will be a great help for reducing the transmission loss of the lithium niobate waveguides. Study process method could use to other components.

並列關鍵字

Optical waveguide ； titanium dioxide ； glass ； lithium niobate

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