使用64°Y-cut 鈮酸鋰基板及128°Y-cut 鈮酸鋰基板濺鍍二氧化鈦薄膜製作表面聲波光催化元件。利用X 光繞射儀 (X-ray Diffraction,XRD)、掃描式電子顯微鏡 (Scanning Electron Microscope,SEM) 、螢光光譜儀Photoluminescence Spectrometer,PL)進行薄膜之晶體結構、表面形貌及發光特性檢測。經由紫外光照射亞甲藍水溶液進行光催化檢測。光催化效率於指叉狀電極寬度之影響及所激發電壓之振幅元件進行研究。在64°Y-cut 鈮酸鋰基板上使用40um 指叉狀電極,及峰對峰電壓0.95V 具有最大的光催化效率。
TiO2 thin films sputtered on 64° Y-cut LiNbO3 and 128° Y-cut LiNbO3 were used to fabricate the surface acoustic wave photocatalytic devices. The crystalline structure, surface morphology, and luminescence characteristic of the films were examined by X–ray diffraction , scanning electron microscopy, and photoluminescence spectrometry. The photocatalytic efficiency of devices was examined via methylene blue solution under ultraviolet illumination. The effects of width of interdigital transducer and amplitude of excitation voltage on photocatalytic efficiency of devices were investigated. The 64° Y-cut LiNbO3-based device using electrode width of 40 m and peak-to-peak voltage of 0.95 V has the maximum photocatalytic efficiency.