本實驗在Y-cut 128o鈮酸鋰基板上利用黃光微影製程製作40μm線寬之指叉狀電極,並於指叉狀電極上使用射頻磁控濺鍍系統沉積二氧化鈦薄膜,該薄膜濺鍍條件為百分之百的氮氣,濺鍍壓力於10m torr,濺鍍功率200W。經由紫外光和可見光照射甲醛進行光催化檢測。該二氧化鈦薄膜於X光繞射分析儀(XRD)、場發射掃描電子顯微鏡(FE-SEM)進行薄膜結晶構造及表面形貌分析,能量散步光譜儀(EDS)和光致發光光譜儀(PL)。 元件分析由網路分析儀量測,分別分析插入損耗和相位之元件響應特性,光催化在二氧化鈦摻雜氮於40μm線寬之指叉狀電極,及峰對峰5V於照射可見光對光催化效率研究最好。
In this experiment, a 40μm line width interdigital transducer was fabricated on a Y-cut 128° lithium niobate substrate using a photolithography process. A titanium dioxide thin film was deposited on the interdigital transducer using radio frequency magnetron sputtering system. Photocatalytic detections of formaldehyde were examined by ultraviolet and visible light. The crystalline structure and surface morphology of titanium dioxide films were characterized by X-ray diffraction, field emission scanning electron microscopy, energy walk spectrometer, and photoluminescence spectrometer. The insertion loss and phase response of surface acoustic wave devices were analyzed by a network analyze. The input voltage at 5V under the irradiation of visible light has the best efficiency of photocatalytic degradation of formaldehyde.