應用二氧化鈦薄膜於表面聲波元件

Apply TiO2 thin film to surface acoustic wave device

林義順(Yi-Shun Lin)

指導教授 ： 水瑞鐏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2010年)

摘要

使用射頻磁控濺鍍系統沉積二氧化鈦薄膜於ST-cut 石英基板上，其薄膜晶體結構、表面形貌以及發光特性，分別使用X 光繞射儀、場發射式電子顯微鏡以及光致發光光譜儀。使用射頻磁控濺鍍系統濺鍍出來的二氧化鈦薄膜均勻且緻密，並用於表面聲波元件上，其分析表面聲波元件二氧化鈦/石英之機電耦合係數、溫度頻率係數以及靈敏度對元件的影響。本研究還探討了二氧化鈦薄膜在不同的濺射參數內紫外光線對電阻之間的互相影響。

關鍵字

二氧化鈦 ； 石英 ； 表面聲波 ； 濺鍍

並列摘要

TiO2 films were deposited on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structure, surface morphology and luminescent characteristics of films were examined by X-ray diffraction, scanning electron
microscopy, and photoluminescence spectrometer. The dense and uniform TiO2 thin film was applied to the surface acoustic wave device. The electromechanical coupling coefficient, temperature coefficient of frequency and liquid sensitivity of TiO2 / quartz surface acoustic wave device were investigated. This study also investigated the effect of the interaction between the resistance and the ultraviolet light in the TiO2 thin film on different sputtering parameters.

並列關鍵字

TiO2 ； quartz ； surface acoustic wave ； sputtering

參考文獻

參考文獻

[1] X. Q. Bao, W. Burkhard, V. V. Varadan, V. K.Varadan, ”SAW Temperature Sensor and Remote Reading System”, IEEE 1987 Ultrasonics Symposium, p583- 586, 1987.

[2] Y. R. Roh, H. B. Kim, Y. J. Lee, H. M. Cho, J. S. Chung, S. Baik, “Development of SAW gas sensor for monitoring SOX gas”, Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol. 1, p473-476, 1995.

[3] M. Penza, G. Cassano, P. Aversa, F. Antolini, A. Cusano, A. Cutolo, M. Giordano, L. Nicolais, “Recognition of organic solvents molecules by simultaneous detection using SAW oscillator sensors and optical fiber devices coated by Langmuir-Blodgett cadmium arachidate films”, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, ,vol. 53, p1493-1502, 2006.

[4] K. Lぴange , S. Grimm, M. Rapp, “Chemical modification of parylene C coatings for SAW biosensors”, Sensors and Actuators B, vol. 125, p441–446, 2007.