本論文為研究結合氧化鋅與二氧化鈦薄膜特性之表面聲波元件,並應用於氣態甲醛之紫外光光催化降解。於康寧玻璃基板上濺鍍線寬為5µm的鋁金屬指叉狀電極,並使用射頻磁控濺鍍系統沉積氧化鋅薄膜作為表面聲波元件之壓電層以及二氧化鈦薄膜作為表面聲波元件之感測層,透過X光繞射分析儀(XRD)、螢光光譜分析儀(PL)、場發射掃描式電子顯微鏡(FESEM)以及能量散佈光譜儀(EDS)進行薄膜晶體結構、表面形貌以及發光特性分析。 表面聲波元件透過網路分析儀量測元件頻率響應,並施予不同電壓於複合薄膜元件進行紫外光光催化降解甲醛氣體,最後發現施予峰對峰1V電壓之複合薄膜表面聲波元件有最佳光催化降解甲醛氣體之效率,提升了20%的甲醛氣體降解效率。
In this paper, the surface acoustic wave (SAW) device with the characteristics of zinc oxide and titanium dioxide films was studied and applied to the photocatalytic degradation of gaseous formaldehyde. An aluminum metal interdigital transducer electrode with a line width of 5 μm was sputtered on the Corning glass substrate; the zinc oxide thin film was deposited by RF magnetron sputtering system as a piezoelectric layer and the titanium dioxide thin film as a photocatalytic layer. X-ray diffraction, fluorescence spectroscopy, field emission scanning electron microscopy and energy dispersive spectrometer were used to analyze the crystal structure, surface morphology and luminescence properties of the films. The frequency response of the device was measured by the network analyzer, and the different voltage was applied to the surface acoustic wave device with composite film to carry out UV light photocatalytic degradation of formaldehyde gas. It was found that Vp-p 1V increases the degradation efficiency of formaldehyde gas over 20%.