本研究使用具經濟效益反應溫度低於100℃以下的低溫水溶液法合成氧化鋅奈米柱-氧化鎂殼膜奈米複合材料,改變製程參數條件包括溫度、時間、濃度來觀察對於結構所造成之影響。第一階段在成長氧化鋅奈米柱過程中添加醋酸鎂觀察形貌變化,第二階段於成長分散的氧化鋅奈米柱上披覆氧化鎂產生氧化鋅-氧化鎂殼膜構造。最後將氧化鋅奈米柱模板進行氨水蝕刻處理,去除氧化鋅形成氧化鎂奈米管。本實驗利用X-Ray 繞射儀、陰極激發光光譜儀、場發射掃描電子顯微鏡、穿透式電子顯微鏡觀察晶體結構、發光特性、表面形貌…等材料特性。探討奈米結構成長行為以及相關光學性質,水溶液法合成之氧化鋅與氧化鎂殼膜奈米結構能夠提升氧化鋅發光強度,適合於短波長元件應用,配合氧化鋅優越的光電特性,未來希望可開發應用在光電半導體、UV-LED 元件研究領域。
In this study, the cost-effective and low temperature aqueous solution (Reaction temperature lower than 100℃ or less) method is employed to synthesis of ZnO nanorod-MgO shell nanocomposite materials. The processing parameters including temperature, time and concentration are changed to study their effects on the microstructure and properties of the nanocomposites. In the first part, vertically aligned ZnO nanorods were synthesized via the aqueous solution method on the ZnO seed layer which is deposited by RF sputter system on silicon substrates. In the second part, deposition of the MgO shell onto the ZnO core forms the core-shell structures. Finally, the template ZnO nanorods were etched with ammonia to form MgO nanotubes. X-ray diffracmeter, optical spectrumeter and transmission electron microscopy were used to study structure, optical properties and microstructure of the composites. Our experimental results demonstrate that the ZnO/MgO core-shell nanostructures offer better optical properties, which is suitable for the short-wavelength device application.