水溶液法合成鋁添加氧化鋅奈米線製備及特性研究

Synthesis and Characterization of Al doped ZnO nanowire arrays by Aqueous Solution Method

王珮茹(Pei-Ru Wang)

指導教授 ： 曾俊元

國立臺北科技大學/工程學院/材料及資源工程系研究所/碩士(2010年)

摘要

本研究以具經濟效益反應溫度低於100℃以下的低溫水溶液法合成鋁添加氧化鋅奈米線，改變製程參數條件包括溫度、時間、濃度來觀察對於結構、表面形貌及光學性質所造成之影響。
實驗上主要分成兩部分:第一部分於矽基板上利用旋轉塗佈法製備氧化鋅晶種層後經由水溶液合成法成長氧化鋅奈米線。第二部分以水溶液法在旋鍍有氧化鋅晶種層的矽基材置於反應溶液中再直接添加1~3 at% 硝酸鋁，探討不同時間參數隨鋁濃度增加其鋁添加氧化鋅奈米線在形貌與結構方面變化及光學特性的影響。第三部分以水溶液法在旋鍍有氧化鋅晶種層的ITO基材上合成鋁添加氧化鋅奈米線，並給予一UV光源探討經由UV光照射後電流的變化情形。本實驗利用X-Ray 繞射儀、陰極激發光光譜儀、場發射掃描電子顯微鏡、穿透式電子顯微鏡觀察晶體結構、發光特性、表面形貌…等材料特性。在光學性質上鋁的添加對於紫外光發光強度有所提升，適合於短波長元件應用，配合氧化鋅優越的光電特性，未來希望可開發應用在光電半導體、UV-LED 元件領域。

關鍵字

氧化鋅奈米線 ； 鋁添加氧化鋅奈米線 ； 水溶液法

並列摘要

In this study, the cost-effective and low temperature aqueous solution (Reaction temperature is lower than 100℃) method is employed to synthesis of Al doped ZnO nanowire arrays. The parameters include temperature, time and concentration,which are changed for effects in the microstructure and optical properties.
The study is acquired in this study and summarized as below:
(1)Vertically aligned ZnO nanowires were synthesized via the aqueous solution method on the ZnO seed layer which is deposited by Spin coating on silicon substrates. (2) Deposition of Al (1~3 at%) doped ZnO nanowire arrays and we will observe nanostructures by the analysis. (3) Following the (2), we try to use the same parameters to synthesize from the ITO substrates, and To investigate the improvement of the substrates. The results show a well rectifying behavior and strong photo response to the ultraviolet (UV) lights.
Finally,X-ray diffracmeter, optical spectrumeter and transmission electron microscopy were used to study structure, optical properties and microstructure of the composites.
As a result, during this study exhibits Al doping of ZnO nanowire has good optical properties, which is suitable for the short-wavelength device application.

並列關鍵字

ZnO nanowires ； Al doped ZnO nanowire ； Aqueous solution method

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