- 學位論文
應用於精密儀器之複合式減振平台研究
The Analyses and Experimental Measurements of Isolation Benches for Precision Machinery
摘要
本研究中主要在探討純鋼結構式及複合式減振平台系統之減振效能，本文之所謂「複合式」減振系統，係指鋼構平台再另加一隔振元件所結合構成之平台系統。研究過程中，係以平台實物測量之方式進行，同時也考慮了橡膠、混凝土、及空氣墊等三類，共五種形式之複合平台，經量測結果發現，所謂橡膠墊類之阻尼材，雖具有減振效果，但也會因載重､材質及疊層數目等因素，其自然頻率會因荷重增加而往低頻偏移，甚至幾成剛體，影響其減振效能；而氣壓墊類者雖有較佳之高頻減振效果，卻也具有低頻區放大效應之缺點，故不適用於對低頻區振動敏感之儀器，也即設計選用時必須慎重選擇，才能避開已知之低頻共振影響區域，如此才能顯現減振效能。本文之結論，以線寬檢測儀進一步比較，檢測影像確認本文之結論為正確。
並列摘要
The main objective of the present study is to look into the vibration reduction effects of compound work benches. The so-called compound work bench is the steel-structural bench that is inserted by a soft material as a damper or isolator. Since there exists no theoretical study or simulation software, this investigation is completed by the experimental measurements. In addition, three categories of damping materials are considered. They are the concrete, rubber and air- filled pad, and divided into five different types of compound benches. It has been found that the rubber may be a good damper only when it is used within the elastic range. Otherwise, the rubber may be over-compressed and become rigid. On the other hand, the air-filled pad is commonly used as an isolator and is also found as a good damping material for the compound workbench in slightly high frequency ranges. However, it may not be suitable for low-frequency sensitive instruments, since the air-filled isolator may amplify the low frequency vibrations from the environmental floors. The conclusions of the study have been further verified by the image of a line width inspector. The images substantiate the reported results.