利用電化學加工研磨方法製作微細探針之相關研究

A study on using ECM method for polishing to fabricate micro probe

馮華(Hau Feng)

指導教授 ： 許東亞

國立臺北科技大學/機電學院/機電整合研究所/碩士(2014年)

摘要

微細探針使用相當廣泛，然而以電化學加工方式製作高長度直徑比之幾何形狀微細探針，大部份是呈現尖端式之錐形細小工具，故本論文主要利用銅合金套環為陰極的電化學加工研磨方式加工製作微細鎢針。研究中將自行組裝電化學加工實驗設備，然後以PLC為主，控制Z軸向運動，帶動陽極電極(ψ0.3mm鎢棒材料)對著在氫氧化鈉溶液電解槽內的陰極套環中心作上下進給運動，並搭配CCD影像擷取裝置將微細電極工具的影像進行尺規比對，監視微細電極工具之加工狀況。
本研究在探討電化學加工過程中，不需調整加工間隙，依加工外型判斷，建立一組製作直徑50µm以下，長度1mm以上之細小電極工具為目標的最佳電解電壓。首先量測不同濃度溶液與電極工具間的靜態電壓與電流(V-I)參數及液面氣泡反應狀況，建立加工溶液的基本電壓與電流(V-I)函數，依參數選用所使用的加工溶液與加工電壓範圍，進行階段性的不同電解電壓加工，分析探針幾何形狀找出最佳加工電壓模組。

關鍵字

電化學加工 ； 銅合金套環 ； 微細探針

並列摘要

It is quite extensive that the very small probe is used, but make high length diameter than its geometirc form's very small probe by way of electric chemical milling, the majority is to present the peak type tiny tool of toper, so this thesis mainly utilizes one set of rings of alloy of copper to grind the way and process the very small tungsten needle for the electric chemical milling of the negative pole. Will assemble the experimental facilities of electric chemical milling while studying by oneself, then take PLC as the core, control Z axial motion, drive the one set of rings centre of negative pole where the positive pole electrode (the excellent material ofψ0.3 mm tungsten) is facing toward oxidizing in hydrogen in the trough of electrolysis of solutions of sodium to enter to sports up and down, collocate CCD image pick, fetch device go on rulers very small electrode image of tool than right, monitor the processing state of the very small electrode tool.
This research does not need to adjust and process the interval in the course of probing into electric chemical milling, judge, set up a group and make under fifty microns of diameter, the tiny electrode tool of more than one millimeter in length is the best electrolytic voltage of the goal in accordance with the appearance of processing. The bubble reflects the state static voltage and electric current parameter and liquid that quantity examines among different thickness solution and electrode tool at first, set up basic voltage and electric current function of processing solution, select processing solutions used for use and process voltage range in accordance with the parameter, carry on phased processing with the electrolytic voltage, it is analyzed that the geometirc form of the probe finds out and processes the mould group of the voltage bestly.

並列關鍵字

electrochemical machining ； copper alloy rings ； fine probe

參考文獻

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