- 學位論文
線上彩色共焦量測機台之研發
Development of In-situ Chromatic Confocal Measurement Platform
摘要
本論文提出線掃描彩色共焦顯微術，利用波長解析之彩色共焦以及體積誤差之分析，實現一次性及高精度微觀表面輪廓量測，在一體的三軸量測機台之研發。光學共焦量測對微小的表面輪廓已經成為非常重要，由於其高縱向的可量測範圍和出色的垂直解析。 在過去幾十年裡，使用光學檢測迅速的獲得3D表面輪廓資訊，引起了自動化光學領域極大的興趣。有效地提高量測速度和效率是重要的挑戰，對線上微型3D尺寸的檢驗已經成一個關鍵問題。因此，在本研究中，使用一個彩色共焦探頭，利用寬帶光源結合一個彩色色散物鏡，並建立線掃描的寬帶波長共焦數學模型和產生精準的波長到深度之轉換，線上3D輪廓量測在一次性的方法。更重要地，本研究目的在於整合彩色共焦量測探頭及XYZ三軸平台，研發出一台線上彩色共焦量測機台，並量測該系統之體積誤差，如定位誤差、偏角誤差、移動軸之間的直線度和垂直度，一般常見和值得注意的是影響線掃描量測系統的量測精度。因此，為解決這個問題，三軸系統之21項體積誤差的量測與分析以及導出掃描系統的體積誤差模型是重要的。我們的實驗結果證實，使用研發的三軸線掃描量測機台，實際進行待測物體表面微形貌之量測，可以正確的獲得該待測物體3D輪廓尺寸，實現自動化線上即時彩色共焦量測。
並列摘要
This article presents the development of line-scanning chromatic confocal microscopy using wavelength-resolved chromatic confocal principle and the analysis of volumetric errors of compensation to achieve one-shot and high-accuracy microscopic surface profilometry in an integrated three-axis scanning machine. Optical confocal measurement for microscopic surface profilometry has become extremely important due to its high longitudinal measurability range and excellent vertical resolution. In the past few decades, rapid acquisition of surface 3-D contour information using optical detection has attracted tremendous interest in the field of automatic optical inspection (AOI). How to enhance measurement speed and efficiency is the main challenge and becomes a key point for online 3D micro inspection. Therefore, in this study, a chromatic confocal probe employing broadband light as well as a chromatic dispersion objective is developed to establish a broadband-wavelength confocal mathematical model of line scanning and to generate accurate wavelength-to-depth conversion for in-situ 3-D profile measurement in one-shot manner. Most important of all, this research aims to integrate the developed measuring probe with the XYZ scanning machine to measure the system volumetric errors, such as positioning errors, angular deviation, moving straightness and squareness between axes which are generally common and significantly affect the measuring accuracy of the line-scanning measuring system. Thus, to solve the issue, it is necessary to measure and analyze of 21 volumetric errors in 3-axis system as well as to derive the volumetric error model for the scanning system. Our experimental results verified that using the development of three-axis scanning measuring machines to measure microscopic surface profilometry can get the correct measured object’s 3D contour and size as well as achieve an online and automatic chromatic confocal measurement.