彩色共焦顯微三維形貌量測術之研發

Research of Chromatic Confocal Three-dimensional Surface Profilometry

陳昭男(Chao-nan Chen)

指導教授 ： 陳亮嘉

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2009年)

摘要

本研究結合線型共焦量測原理及白光色散技術，利用共焦顯微術特有之光學切片能力，結合光譜色散之高解析，發展高速、高縱向量測範圍及高解析之線掃描彩色共焦顯微三維輪廓量測技術與系統。有鑒於共焦量測系統需使用縱向掃描來獲得形貌之深度資訊，將造成量測效率不佳。因此，本研究之線型彩色共焦架構，可使白光線光源產生軸向色散並聚焦在不同深度，同時獲得聚焦表面之反射光譜，經由線型光譜儀解析並將光譜與深度進行校正比對，可快速精確還原待測物之剖面形貌，經橫向位移即可重建待測物之三維形貌。以實際使用之細微元件驗證系統精度與性能，實驗系統之深度解析可達深度量測範圍之0.11%範圍內，且量測之平均誤差在量測全範圍高度之0.3%以內，驗證此量測系統可有效地達成高速精確之共焦三維輪廓量測。

關鍵字

彩色共焦 ； 共焦顯微鏡 ； 多波長 ； 表面輪廓量測 ； 三維形貌量測

並列摘要

An on-line 3-D surface profilometer for micro surface profiles with a long range and high resolution measurement was successfully developed using innovative slit-scan multi-wavelength confocal microscopy. In conventional confocal microscopy, vertical scanning of the object’s surface by either stage depth movement or shifting of the objective lens is extremely time consuming, thus resulting in unacceptable efficiency for on-line inspection. To overcome this, in this research, a multi-wavelength confocal microscope employing a broadband light source in combination with a chromatic dispersion objective was developed to generate an accurate wavelength-to-depth conversion for 3-D profile measurement. A specially designed objective is capable of modulating a broadband light to produce the axial chromatic dispersion and various focus on a series of continuous depths along the z-axis and then obtain the corresponding reflected light spectrum from the object’s surface.
The reflective spectrum is spatially filtered by a slit and then a peak position with respect to the filtered spectrum for every measuring point along the scanning line is detected by a spectral image sensing unit for generating the sectional profile of the measured surface efficiently and accurately. By doing this, the vertical scanning operation can be completely avoided and its measurement time can be greatly shortened. By designing the objective, the depth measurement range can be ranged between few to several hundred micrometers and the depth measurement resolution can reach to 0.11% of the overall detection range. From the experimental test, it was confirmed that the maximum measurement error and repeatability can be controlled well within 0.3% of the overall measurement range. The measurement efficiency can be significantly improved for on-line automatic optical inspection (AOI).

並列關鍵字

Confocal ； chromatic ； multi-wavelength ； microscopy ； high speed, topography ； three-dimensional measurements

參考文獻

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