創新型即時同步相移干涉式三維輪廓量測儀

Innovative 3-D Surface Profilometer Using Simultaneous Phase Shifting Interferometry

賴皇文(Huang-Wen Lai)

指導教授 ： 陳亮嘉

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2007年)

https://doi.org/10.6841/NTUT.2007.00293

摘要

本研究設計一套即時同步相移干涉儀，系統光源以DPSS雷射模組，搭配偏極板、平板分光鏡、八分之一波板與偏極立方體分光鏡等光學元件，利用單一取像同時擷取四個不同相移量之干涉影像，以相位移干涉技術為基礎，建構在邁克森顯微干涉光路架構上。首先將光源調制成一線偏極光，此線偏極光經過平板分光鏡後，以非偏極分光方式分成參考光與測物光，使參考光與測物光產生干涉形成兩個干涉光場，各干涉光場中之測物光和參考光間之相位差量皆不相等，分別為180與0度，再經過兩個並排之偏極立方體分光鏡將兩個光場分成四個子干涉光場，四個子干涉光場相位分別為180、0、180與0度；若在參考光軸中鋁膜反射鏡之前加入一八分之一波板，則四個子干涉光場相位分別為180、0、270與90度，再以CCD即時同步擷取不同相移量之干涉影像，經過相位封裝與相位還原之相位移演算法計算，得到物體之表面輪廓尺寸，使其能運用在線上之即時動態量測，避免環境振動干擾，可節省控制環境振動之硬體成本。因設計之系統尚在雛形之階段，因此在最後實驗部分，建立一套平面式之實驗系統，來驗證系統之可行性和探討與分析相關問題。目前實驗系統已可得到三個較佳之干涉影像，另一個影像由於干涉之光強比差異太大，造成干涉影像對比度不好，未來俟改善視寬之大小與系統參數最佳化，再轉移至所設計之顯微系統中。

關鍵字

即時同步相位干涉儀 ； 干涉光場 ； 表面輪廓尺寸 ； 環境振動

並列摘要

Urgent needs for high-speed, non-contact on line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. The research is aimed to develop a nano-scale surface profilometer with high measurement accuracy and repeatability for in-line AOI. Optical phase shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high accuracy properties. With its simultaneous capability in acquiring a series of phase-shifting images, simultaneous phase-shifting interferometry can avoid negative effects caused by vibrations and air turbulence within factory environment. In the research, an innovative interferometric measuring apparatus as well as its novel phase shifting algorithm is proposed. The interference light is dispersed into four beams, which are shifted in phase by respectively pre-determined phase shifting quantities, as such 180, 0, 180 and 0 degree or 180, 0, 270 and 90 degree. Four interferograms are simultaneously captured by a single image sensor. Polarization and phase retardation are used to achieve the appropriate phase differences and even light intensities between the four interferograms. A novel two step and four step phase-shifting algorithm with a phase shift each was applied to calculate the phase map. A prototype system was established and measurement system parameters were evaluated to verify the feasibility of the developed methodology.

並列關鍵字

Automatic Optical Inspection ； Novel Phase Shifting Algorithm ； Simultaneous Phase Shifting Interferometry ； Single Image Sensor

參考文獻

[6] 鄭翔允，使用低同調光源之Savart’s剪切干涉儀，碩士論文，國立台北科技大學光電工程研究所，台北，2006。

[19] 高偉傑，白光共焦顯微三維表面輪廓量測系統之研發，碩士論文，國立台北科技大學自動化科技研究所，台北，2005。

[2] R. Smythe and R. Moore, “Instantaneous Phase Measuring Interferometry,” Optical Engineering, vol.23, no.4, 1984, pp.361-364.

[3] C. L. Koliopoulos, “Simultaneous Phase Shift Interferometer,” SPIE Advanced Optical Manufacturing and Testing II, vol.1531, 1991, pp.119-127.

[7] J. E. Millerd, S. J. Martinek, N. J. Brock, J. B. Hayes and J. C. Wyant, “Instantaneous Phase-shift, Point-diffraction Interferometer,” Proceedings of SPIE, vol.5380, 2004, pp.422-429.