即時共焦顯微三維輪廓量測技術之研發

Development of Simultaneous Confocal Full-Field Surface Profilometry for Automatic Optical Inspection

張奕威(Yi-Wei Chang)

指導教授 ： 陳亮嘉

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2007年)

摘要

本研究運用數位微鏡組裝置(DMD)之數位條紋投影技術，發展全域式即時共焦顯微三維輪廓量測系統。利用數位微鏡組裝置具備有高亮度與高空間解析度之特性，達成全域式光學三維輪廓量測。有鑑於目前共焦量測系統均利用垂直掃描的方式來獲得三維輪廓資料，在量測上將造成量測效率不彰以及易受到線上量測環境振動問題之干擾。因此，本研究利用量測光學系統架構之創新設計，藉由分光架構與控制不同厚度之玻璃板，使CCD取得四張不同聚焦位置之影像，並使用曲線擬合之技術，偵測出聚焦反應曲線峰值位置。針對階高式待測物可精確且快速地完成全域式三維輪廓量測。以實際使用之細微元件驗證系統精度與性能，實驗系統之空間解析可達0.15µm，且量測之平均誤差在量測全範圍高度之3%以內，驗證此量測系統可有效地達成即時共焦三維輪廓量測。

關鍵字

數位微鏡組裝置(DMD) ； 共焦顯微鏡 ； 數位條紋投影 ； 表面輪廓量測 ； 三維形貌量測

並列摘要

A simultaneous confocal full field 3-D surface profilometer using digital structured fringe projection is presented in the article. Using digital micromirror device (DMD) moiré projection, a digital fringe pattern is developed for lateral scanning with high spatial resolution and measurement efficiency. Four conjugate image sensing modules are configured at four different designated focusing positions, which are controlled by glass plate of different thickness. A depth-focus response curve can be established by achieving simultaneous vertical scanning of full-field surface profilometry. A standard step height has been measured to attest the measurement accuracy and feasibility of the developed approach. The depth measurement resolution can reach up to 0.15µm and the maximum measurement error was verified to be within 3% of the overall measuring height size. The measurement efficiency can be significantly improved for on-line automatic optical inspection (AOI).

並列關鍵字

Digital Micromirror Device (DMD) ； confocal microscopy ； digital fringe projection ； surface profilometry ； 3-D measurement

參考文獻

[7] 高偉傑，白光共焦顯微三維表面輪廓量測系統之研發，碩士論文，國立臺北科技大學自動化科技研究所，台北，2005。

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