潔淨室自動化立儲之三維動態流場分析

本論文利用計算流體力學FLUENT進行動態模擬分析，當自動運載裝置於自動化立儲移動時，對整體流場所造成的影響，當物體移動時通常會破壞自動化立儲內強調“單一流向”的氣流流向，造成汙染物被捲入渦流中進而造成對產品本身的汙染。而本論文模擬分析之模型與目前TFT-LCD廠內實際運作的自動化立儲相同，當自動運載裝置移動並於車體底部產生汙染物時，分析其流場和汙染物分佈情形。結果顯示，當自動運載裝置移動時車體後方因產生負壓空缺空間，產生誘引氣流來補足此空缺空間，導致渦流於車體後方產生可能會吸入汙染物，並且隨著移動速度越快，渦流影響的區域變大且其中上捲氣流將汙染物揚起，針對自動運載裝兩支桅桿區域移動時周圍會有渦流產生，使得汙染物淤積於周圍，不易排除，針對微粒部份，微粒本身終端沉降速度(VTS)遠小於自動運載裝置移動速度(Vcrane)，因此自動運載裝置移動速度為主要影響微粒於自動化立儲內運動軌跡的因素。

關鍵字

潔淨室；自動化立儲；自動運載裝置；動態模擬

並列摘要

This study is concerned with three-dimensional airflow field for identifying the excessive contaminant transport in the TFT-LCD stocker mini-environment in which the entrainment of contaminant into the airflow field is contributed by the moving cranein the stocker. As the crane moves in the stocker, it may deterioratethe designated unidirectional airflow field and cause the entrainment of contaminantsfrom its rear base into the induced turbulence flow. The deposition ofsuch contaminants on the surface of TFT-LCD products often causes defects and reduces the product yield rate as well as secondary contamination. To investigate the airflow field and contaminant transport, the numerical simulation using computational fluid dynamics (CFD) toolbased on k-ε modelhas been conducted. The numerical studyshows that the moving crane introduces a low and negative pressurized region at its rear and the displacement of air in thenegative pressurized region induces the turbulence flow which leads to the entrainment of contaminant into the airflow field. It is also found that the turbulence region at the rear of crane becomes larger with the increase of moving speed of crane and the entrainment of contaminant has worsened. Also, the two vertical structures installed at the top of moving crane leads to the formation of turbulence flow and the stagnant of contaminant in the surrounding area. The terminal velocity of contaminant (VTS) is much lower than the moving velocity of crane （Vcrane). Therefore, the trajectory of contaminant in the stocker is primarily affected by the moving velocity of crane.

並列關鍵字

Cleanroom ； TFT-LCD stocker ； Crane ； Dynamic Simulation

參考文獻

[10] 黃淳鴻，潔淨室內自動引導搬運車之三維動態流場影響分析，碩士論文，國立台北科技大學冷凍空調研究所，台北，2006。

[13] 吳俊緯，潔淨室內自動導引搬運車與潔淨氣流交互作用實驗與分析，碩士論文，國立台北科技大學能源與冷凍空調空工程研究所，台北，2008。

[2] International Organization for Standardization, Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness ISO14644-1 First Edition, 1999.

[3] Murakami, S., Kato, S. and Suyama, Y., "Numerical and Experimental study on Turbulent Diffusion Fields in Conventional Flow Type CleanRoom," ASHARE Transactions, vol.95,1988,pp.469-493.

[5] Kanayama, H., K. Toshigami, et al."Finite-Element Analysis of Air-Flow around an Automatic Guided Vehicle,"Journal of Wind Engineering and Industrial Aerodynamics,vol.46&47,1993,pp.801-810.

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潔淨室自動化立儲之三維動態流場分析

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