潔淨室內自動引導搬運車之三維動態流場影響分析

Three-dimensional Airflow Analysis For AGV in Cleanroom

黃淳鴻(Chun-Hung Huang)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/冷凍空調工程系所/碩士(2006年)

https://doi.org/10.6841/NTUT.2006.00340

摘要

本研究主要利用動態模擬來探討自動引導搬運車在無塵室內移動時，對無塵室內流場所造成之影響，移動物體在無塵室通常會破壞強調”單一流向”的氣流流型，乃至於造成微粒被捲入渦流中進而造成對製程本身或產品的污染。而本研究根據此一有限移動邊界問題之特性，利用電腦軟體FLUENT進行模擬分析，採用有限容積法搭配動態網格對於無塵內的自動導引搬運車（AGV）對內部流場的影響進行分析，所有問題中之邊界條件均以常見之工業規格及標準給定，其模擬分為單機、AGV負有負載物以及改變入口FFU之分佈，並在單機狀態下於機台釋放微粒用以觀測微粒沈積之情況。結果顯示AGV於移動時兩側會有迴流產生可能會吸入污染物，入口氣流可抑制翻轉自高架地板的誘引氣流，避免對AGV及其負載物之污染，但填補AGV後方因固體邊界移動所產生空洞之氣流會使AGV後方表面有微粒沈積。

關鍵字

自動導引搬運車 ； 潔淨室 ； 動態模擬 ； 計算流體力學

並列摘要

Dynamic simulation technique was used to study the airflow field of an AGV moving in the cleanroom area. Moving objects may destroy unidirectional airflow patterns in the cleanroom. In such a case, particles will also suspend in the vortex. All boundary conditions were set according to common industrial practices. The cases studied include: 1. A single AGV moving in the cleanroom; 2. An AGV with FOUP moving in the cleanroom, and 3. Variable Fan Filter Unit (FFU) coverage rate of the cleanroom. Also, a process tool is generating particles in the cleanroom. The result shows that when an AGV starts to move, vortexes created on both side of AGV. The inlet airflow can force the back flow from the raised floor from reaching to the upper side of the AGV. The airflow from the back side due to the moving motion will cause particles to stick on the back side surface of AGV.

並列關鍵字

AGV ； Cleanroom ； Dynamic Simulation ； Computational Fluid Dynamic

參考文獻

[10] 蔡俊宏, “潔淨室的氣流特性與潔淨度控制” ,中國冷凍空調雜誌, pp.78-88, 1999年6月.

[11] 蔡俊宏, “潔淨室中潔淨度控制的實例探討” ,中國冷凍雜誌, pp.73-81, 1999年8月.

[1] William C.Hinds, “Aerosol Technology”, Second Eidition,1999.

[2] “Procedural Standards for Certified Testing of Cleanrooms”, NEBB Second Edition,1996.

[3] “Cleanrooms and Associated Controlled Environments”, ISO14644-1 First Edition,1996.