潔淨室內自動導引搬運車與潔淨氣流交互作用實驗與分析

An experimental study of the effects of a moving automatic guided vehicle on airflow patterns in clean rooms

吳俊緯(Jun Wei Wu)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2008年)

https://doi.org/10.6841/NTUT.2008.00116

摘要

移動物體在潔淨室或微環境中內通常會破壞強調「單一流向」的氣流型式，乃至於造成微粒被捲入渦流中或來自固體邊界的反彈氣流，進而造成對製程本身或產品的污染，例如自動導引搬運車(Automatic Guided Vehicle, AGV)、自動立儲(Auto-stocker)或其它類似的移動載具。
本研究內容主要包含：(一)以不同風速與車速下觀察AGV行走於19%的高架地板上之流場變化。(二)在潔淨室內無釋放污染物及有機台釋放污染物的條件下，分別量測AGV行走於19%及50%的高架地板上時，上方及後側方所捲揚及吸入的微粒數量。故本研究規劃一具全面覆蓋之單一流向潔淨室之縮尺模型，且將對自動導引搬運車(AGV)對潔淨室內部氣流的影響與微粒分佈進行量測。其結果顯示原本在AGV車尾出現的尾流，則因三維效應而變成吸入車後方負壓區的誘引氣流，被誘引且從高架地板之反彈氣流因受下洗潔淨氣流的壓制，使部分的反彈氣流高度有限，同時也得到在兩種不同開孔率與不同風速及車速下，AGV行走於潔淨室內之上方及後側方微粒數量的變化。

關鍵字

自動導引搬運車(AGV) ； 潔淨室 ； 微粒計數器 ； 煙霧產生器

並列摘要

A moving object, such as automatic guided vehicles (AGV), automatic stockers, or other similar loaders, destroys the uni-directional airflow patterns in clean rooms. The particles provoked by wake and vortex behind the AGV possibly contaminate the wafers or the substrate on a cassette. This research examined the influences of velocities of the airflow and the AGV, moving on the raised floor with an opening rate of 19%, on the airflow patterns, and measured the quantities of particles at the back and the top of the AGV, moving on the raised floor with opening rates of 19% and 50%, at conditions of particles released by a tool and no particle generation. This study conducted experimental measurements in a reduced-scale uni-directional clean room with a ceiling coverage rate of 100%. Results show that the wake at the back of AGV became induced airflow, and the clean downward flow suppressed the rebounded air flow from the raised floor and limited its rebounded height. The quantities of particles at the back and the top of the moving AGV were also measured at various velocities of airflow and AGV at the two opening rates of the raised floor.

並列關鍵字

AGV ； Cleanroom ； Particle Counter ； Smoke Generator

參考文獻

[8]蔡俊宏，「潔淨室的氣流特性與潔淨度控制」，中國冷凍空調誌，1999年6月，第78-88頁。

[20]王輔仁、李書哲、張良鉦、李國正，「無塵室潔淨度之測試程序與確效作業探討」，國立勤益技術學院冷凍空調系。

[21]簡志明，「廠房氣流模擬分析」，勢流科技股份有限公司。

[4]Kanayama, H., Toshigami, K., Tashiro, Y., Tabata, M., Fujima, S., 1993, “Finite Element Analysis of Air Flow Around an Automatic Guided Vehicle”, J. of Wind

[5] Kanayama, H., Toshigami, K. and Tashiro, Y., “Air Flow Computation around an Automated Guided Vehicle”,　Comp. Fluid Dyn, Vol.7, 1996, pp.155-162.