本論文分別以射頻磁控濺渡法與超音波輔助噴法成長摻錳的氧化鋅薄膜。由結果分析得知以上兩種方法都成功的沉積出具有鐵磁性的ZnMnO薄膜。也就是說本實驗以設備簡單、價格便宜的超音波輔助噴霧,於常壓下成功的在矽基板上,成長出Zn0.982Mn0.018O薄膜,在77K的溫度下量測到其具有鐵磁性。 經由XRD與穿透光譜的量測得知,我們成功的把錳雜入氧化鋅中,並且沒有錳的析出物或是團簇的現像產生。超音波輔助噴霧成長之Zn0.982Mn0.018O,其Hc(coercive field)、Mr(remanentmagnetization)與Ms(saturation magnetization)分別為43 Oe、4.08 μEMU,30μ EMU。由上述實驗的結果得知,使用上述兩種成長機制沉積出的ZnMnO在77K時具有微弱鐵磁性,推測其居禮溫度超過77K。
The ZnMnO thin films were grown on Si substrate by reactive magnetron sputter,and spraying pyrolysis method. X-ray diffraction measurement revealed both sample were wurtzite structure.No evident of any other secondary phases and impurities was detected. And Increasing Mn concentration caused the band-gap increased gradually. The Zn0.982Mn0.018O film were grown on Si substrate by spraying pyrolysis method ,exhibited a weak ferromagnetic characteristic with 77K.