面板廠無塵室氣流場均勻度與污染物濃度散佈

Studies of Airflow Uniformity and Pollutant Dispersion in a TFT-LCD Clean Room

陳昭文(Chao-Wen Chen)

指導教授 ： 楊安石

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2009年)

摘要

由於生產技術的進步與發展，高科技產業對製程之環境要求越來越嚴苛，對於生產過程所需的氣體與化學品越趨於複雜化，同時用量越來大，因此控制產品所接觸之大氣的潔淨度及污染物濃度，使產品與工作人員能在一個良好之環境空間中生產、製造更是刻不容緩，然所有潔淨室的目的皆是要將空氣中的懸浮微粒與污染物去除，因此瞭解微粒在空氣中之運動及分佈情形對設計規劃潔淨室非常重要。
本研究採用乙醇（Alcohol）為污染氣體，模擬面板製程機台管路內氣體洩漏時對潔淨室污染之影響，無塵室區域內釋放乙醇氣體同時搭配多台手持式VOC（揮發性有機化合物）檢測器於潔淨室內作多次不同位置量測。研究結果發現，潔淨室內若有氣體洩漏，經與循環氣流混合後快速均勻濃度，但是整體濃度平均後(由60000ppb快速降至3000~4000ppb)，後續其稀釋濃度需仰賴外氣的供應，整體濃度才逐步慢慢降低(由3000ppb緩慢降至300~400ppb)，污染氣體需藉由擴散作用，本研究結果針對可能污染源對潔淨室影響之分析，將有助於氣體監測器之佈點以及擬定潔淨室微污染之控制策略。
研究結果分析，濃度污染發生時，洩漏源週遭環境濃度較高，前半區塊可以觀察出濃度變化很大(由60000ppb~4000ppb)，後半區塊因為環境稀釋濃度，接近回風道區域則變化很小(由5000ppb~1000ppb)，所以氣體監測器的安裝位置，應放置於靠近機台管路下風處，一旦管路發生洩漏，監測器可立即反應，達到快速處理緊急應變的效果，使工作人員有立即逃生的時效性。
無塵室濃度場的變化與速度場息息相關，採用CFD切出速度場的圖面，由於無塵室氣流側向回風，發現牆面、柱邊及機台端有渦流現象，使濃度或懸浮微粒不容易被稀釋及帶走，驗證實驗時，噴灑點左側區域較寬敞，氣流往左擴散，使濃度或懸浮粒子較易被稀釋及帶走，實驗與理論相互驗證，達到學理應用於實務上的最佳效益。

關鍵字

無塵室 ； 氣流模擬 ； 面板廠

並列摘要

As the progress and development of production technology, high-tech industry to process more and more stringent environmental requirements for the production of gas and chemicals needed to become more complicated, while consumption increasingly great, and so control products come in contact with the the atmosphere, cleanliness and pollutant concentration, so that products with the staff of the environment in a good space, production, manufacturing is even more urgent, ran all the clean rooms which are all aimed to suspended particles in the air and the pollutants removed Therefore, the understanding of particles in the air campaign and the distribution of clean room design and planning is very important.
In this study, ethanol (Alcohol) for the pollutant gases, analog panel machine tube manufacturing process the gas leakage Road when the impact of pollution, clean rooms, clean rooms in the region with the release of ethanol gas at the same time more than one handheld VOC (volatile organic compounds ) detector in the clean room for several different positions measurement solutions. Study found that clean indoor If there is gas leakage, with the circulating gas flow mixture of rapid and uniform concentration, but the overall concentrations averaged (from 60000ppb quickly dropped to 3000 ~ 4000ppb), follow-up to the dilution required to rely on foreign gas supplies, the overall concentration was gradually reduced gradually (from 3000ppb slow down to 300 ~ 400ppb), contamination by diffusion of gas required results of this study for the possible impact of pollution on the analysis of clean rooms, will help the fabric-point gas monitors and the development of clean room micro-pollution control strategy.
The results analysis, the concentration of contamination occurs, the leak source higher concentrations of the surrounding environment, the first half block concentration changes can be observed a significant (by 60000ppb ~ 4000ppb), the latter half of block because of environmental dilution, close to return air duct regions are changing very small (by 5000ppb ~ 1000ppb), so the installation location of gas detectors should be placed close to the wind machine at the next pipe, once the pipeline leak, monitor can be an immediate response, to quickly deal with the emergency response effect of making it work staff the timeliness of an immediate escape.

並列關鍵字

clean room ； CFD ； TFT-LCD

參考文獻

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