六標準差在降低Color Filter RGB製程側蝕之應用研究

A Study of Six-Sigma to Reduce Undercut in the Color Filter RGB process

陳怡碩(Yi-Shuo Chen)

指導教授 ： 陳雲岫

元智大學/工程學院/工業工程與管理學系/碩士(2003年)

摘要

本研究以6-Sigma流程(DMAIC)中之實驗設計改善彩色濾光片RGB彩色光阻製程研究，應用Plackett- Burman濾除設計與反應曲面法之實驗設計手法，找出最佳因子組合與允差設計。
在本論文中，我們先以特性要因圖以及與工程人員討論後，在所有可能因子中，找出對本論文研究之反應值光阻側蝕影響最大的八個因子，分別為塗佈轉速、預烤溫度、曝光機間距、曝光能量、顯影溫度、顯影速度、後烘烤溫度、後烘烤時間。接著我們應用基本型16因子Plackett- Burman設計，找出最具衝擊力的三個因子，分別為預烤溫度、曝光能量、顯影速度。最後我們利用反應曲面法，得到預烤溫度23.5℃、曝光能量235 mJ/cm2、顯影速度8.9m/min時，預測值最佳解為0.47μm，較廠內要求的0.7μm為佳。
本論文並提供一個製程改善案例，作為研究對象公司之經驗傳承與教育訓練教材。

關鍵字

Plackett- Burman濾除設計 ； 反應曲面法 ； 彩色濾光片 ； 六標準差

並列摘要

In this thesis, experimental design which is the improvement stage in the Six-Sigma process is applied to reduce undercut in the color filter RGB process. Plackett-Burman screening design and response surface method are used to find the best factor levels combinations and establish a tolerance design.
Firstly, we utilized fish-bone chart and discussed with engineers to find out eight potential factors from all possible factors. These eight factors are: coater speed, pre-bake temperature, aligner gap, exposure energy, developing speed, developing temperature, post-bake temperature, and post-bake time. We applied basic 16-run Plackett-Burman design to screen out three most active factors which are pre-bake temperature, exposure energy, and developing speed. Then, we implement response surface method to obtain a best operational condition for three active factors and it is pre-bake temperature in 23.5℃, exposure energy in 235 mJ/cm2 and developing speed in 8.9m/min. The best predicted response value is 0.47μm ,under the best operational condition which is better than the current status 0.7μm .
In this research, we successfully improve the process by setting suitable active factors ranges and construct a tolerance design. Also, the experience in improving the process from statistical viewpoint can be a good example for the education training.
Keywords : Plackett-Burman screening design, Response Surface Method, Color Filter, Six-Sigma

並列關鍵字

Plackett-Burman Design ； Response Surface Method ； Color Filter ； Six-Sigma

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