應用8D與PFMEA於LCD Array 製程之channel間之改善

Application 8D and PFMEA in LCD Array Process Improvement Between Channel

方筑屏(chu-pin Fang)

指導教授 ： 陳雲岫

元智大學/工程學院/工業工程與管理學系/碩士(2011年)

摘要

本研究以LCD產業製程為研究對象，由Array製程之 channel間異常進行改善，運用8D程序具體說明每個步驟的執行細節、找出製程問題點並改善，此突發異常連結至製程失效模式與效應分析，將計算出Failure mode RPN值納入分析表預防問題拓延至其他產品，作為未來製程設計與控制的審查要點，提升製程的穩定度與可靠度。本文經由8D程序，執行每一個步驟，發現設備機構之高壓水洗濾心被異物堵塞後，異物藉由濾心的破洞經由nozzle噴灑基板上，解決方案為調整設備的清潔管控方法及加嚴SPC監控機制，確保及預防設備上零件的失效對基板上潔淨度的影響。依對策實施後異常現象明顯改善，我們將此異常納入製程失效模式與效應分析，計算而得RPN值高達294分，將此分列為Critical監控項目，進而改善channel間不良，提升產品良率，另外也水平展開其他產品之文件，預防本次的異常發生在其他產品上，也避免因相同問題遭到顧客抱怨，造成公司損失慘重而失去顧客對公司的信賴。

關鍵字

channel異常 ； 8D改善程序 ； 製程失效模式與效應分析

並列摘要

Quality has become one of the essentials for an enterprise reputation. A rigorous quality control in the manufacturing process is a key to upgrade the products qualification and satisfaction. And the roots caused low yields should be discovered and remedied immediately, and keeping the production process runs at a satisfactory pace to prevent the same problem reoccurring. In this study, we implement 8D procedures to find the roots caused the defects among channels in an array in an LCD manufacturing process. RPN value in the Failure Mode and Effects Analysis (FEMA) is used to rank the seriousness of the discovered roots for unexpected phenomenon in the process. For those discovered roots with high RPN values will be tabulated as a reference to prevent similar obstacles occurring on other manufacturing steps or on developing new products. From this mechanism, our goal is to increase the stability and reliability of the process. Applying 8D step by step, we discover that if the filter in a high-pressure water washing machine has been blocked, and excessive dirty particles were sprayed onto the substrate through the nozzle in the washing machine which results unexpected spots on the channels, the so called defectives. Adjusting the cleaning plan of the equipments and a strict control mechanism in SPC are remedy policies to keep high cleanliness of the substrate and low failure. New remedy policy improves the defects significantly. The RPN for this irregular appearance is up to 294 points which is marked as a critical seriousness in the FEMA. And this finding is ruled as a reference checking when similar defects occur in other process. From this study, we successfully implement 8D-procedure to trouble shooting abnormal occurrence among channels and propose a new thought to monitor the manufacturing process.

並列關鍵字

channel issue ； 8D procedure ； Failure Mode and Effect Analysis

參考文獻

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