超薄玻璃液晶顯示器的製造方式與品質分析研究

減少液晶顯示器(LCD)面板的厚度與重量，能有效提升顯示器的美觀性與可攜帶性。LCD面板的玻璃薄化製程技術，能同時達到面板的厚度減薄與重量減輕，此製程技術是使用於薄膜電晶體(TFT)與彩色濾光片(CF)對組之後。本研究的第一部分，探討LCD面板的玻璃經由氫氟酸(HF)溶液進行蝕刻減薄，但面板表面微小的缺陷會因等向性蝕刻而變大，進而影響面板的品質；此缺陷可嘗試由拋光製程去除，但拋光LCD面板與拋光一般玻璃不同，研究結果顯示不同的LCD面板設計，需搭配不同的拋光參數；此外，開發一種使用塗膠的方式，經證實可有效蓋住缺陷，並可避免因使用拋光製程而限制LCD面板的設計。本研究的第二部分，是針對單面式機械研磨機於薄化製程後，可能造成LCD面板表面厚度不均的缺點進行研究；先以建立數學模式探討此製程的原理，再經由實驗進一步驗證此模式的可行性，並應用此模式求得此單面式機械研磨機的最佳製程參數與最適量產用機台尺寸。本研究的第三部分及第四部分，則是開發全新且環保的LCD面板玻璃薄化製程技術，此兩種新技術都不會用到HF，也不會有傳統機械式研磨產生的粉塵，且可比傳統機械式的玻璃薄化機有更高的玻璃研磨率，並可容易製造出具有高品質且不同厚度TFT與CF玻璃的LCD面板，經實驗測試此兩種新技術都具有穩定的製程與可量產性。

關鍵字

液晶顯示器；拋光；薄化技術；玻璃；研磨

並列摘要

Thinning of liquid crystal display (LCD) panels effectively decreases overall thickness and weight of panels, thereby enhancing the aesthetics and ease of use of portable display devices. The technology is typically carried out after the thin-film transistor (TFT) and color filter (CF) substrates are assembled. The first part of this study presents the thickness of panels etched by HF solution with surface etching defects. Polishing effectively removes these defects from glass. However, polishing a panel is more difficult than polishing glass and a suitable polishing approach is developed. In addition, spin-coating a protective layer above the surface fills the defects and retains optical performance. Unlike polishing, the proposed method applies no pressure to the inner structure in the panel. The second part of the study formulates a new mathematical model of the mechanism of the single-sided lapping machine in the LCD cell thinning process; the model is confirmed experimentally. The model can help to optimize the parameters of the process. In the third part of this study, a novel technology is used in an environmentally friendly process of mechanical thinning. It offers lower surface roughness, a higher cut rate and a lower operating pressure than slurry lapping. The final part of this study develops another novel technology, which provides a higher removal rate, better thickness uniformity and finer surface roughness than slurry lapping. The two novel approaches can produce the TFT-LCD panels that are composed of differently thick TFT and CF substrates. Additionally, they methods are stable and practicable for producing thinning cells.

並列關鍵字

liquid crystal displays ； polishing ； thinning technology ； glass ； lapping

參考文獻

[1-1].K. Takechi, H. Kanoh, and S. Otsuki, Very High Rate and Uniform Glass Etching with HF/HCl Spray for Transferring Thin-Film Transistor Arrays to Flexible Substrates, Jpn. J. Appl. Phys. 45 (2006) 6008.

[1-3].H. Ohkuma, K. Tajima, and K. Tomiki, Development of a Manufacturing Process for a Thin, Lightweight LCD Cell, SID Int. Symp. Dig. Tech. Pap. 31 (2000) 168.

[1-5].C. Iliescu and F. E. H. Tay, Wet Etching of Glass, Proc. Int. Semiconductor Conf. 1 (2005) 35.

[1-6].B. Lesche, F. C. Garcia, E. N. Hering, W. Margulis, I. C. S. Carvalho, and F. Laurell, Etching of Silica Glass under Electric Fields, Phys. Rev. Lett. 78 (1997) 2172.

[1-7].N. Belkhir, D. Bouzid, and V. Herold, Correlation between the Surface Quality and the Abrasive Grains Wear in Optical Glass Lapping, Tribol. Int. 40 (2007) 498.

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超薄玻璃液晶顯示器的製造方式與品質分析研究

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