多孔矽蝕刻製成具有光子晶體結構之高靈敏度重金屬檢測器

Porous Silicon Based Photonic-Sensor for High Sensitive Heavy Metal Ion Detecrtion.

賴建任(Lai, Jian Ren)

指導教授 ： 王本誠 ； 曾繁根

國立清華大學/原子科學院/工程與系統科學系/碩士(2015年)

https://doi.org/10.6843/NTHU.2015.00177

摘要

水為人類生活中不可或缺的物質,人們生活的聚落大多依靠著水源區而成長。人類的社會不斷的進步從最初的農業社會經過工業革命直到現在,隨著工業與科技的成長人們過著比以往相對富裕的生活。但在工業的蓬勃發展也伴隨著許多環境汙染的產生，例如二氧化碳造成全球暖化、工業排放廢水造成各種形式的水汙染等等。這都漸漸的傷害著我們居住的環境。
在水汙染中的重金屬汙染在70~80年代更是打擊台灣的相關農漁牧業，如砷、鎘、汞、鉛等重金屬汙染。有鑑於此，在本研究目的為製造相關重金屬在水汙染的檢測機制。目前的檢測機制大多利用較昂貴的儀器設備或是利用步驟繁複的化學滴定方式來進行水溶液中的重金屬分析。在本實驗中第一代晶片具有一維光子晶體特性並利用簡便的化學合成及表面修飾使其在傅立葉紅外線光譜儀(FTIR)有檢測重金屬的訊號，並且達到定性與定量的效果。第二代晶片為可見光波段之光子晶體搭配電化學還原將待測金屬離子直接在多孔矽孔洞中析出造成較大的折射率改變，達到增強訊號強度與檢測極限之效果。

關鍵字

傅立葉紅外光譜儀 ； 多孔矽蝕刻 ； 重金屬檢測 ； 光子晶體

並列摘要

Water is essential to human life material, settlement of people's lives as much dependent on the water area and growth. Human society continues to progress from the first agricultural society through the industrial revolution until now, people with the growth of industry and technology have had a relatively affluent life than ever before. But in the booming industry it has been accompanied by a number of environmental pollution produced, such as carbon dioxide cause global warming caused by industrial waste water in various forms of water pollution and so on. This will gradually hurting the environment we live.
The heavy metal pollution in water pollution in 70 to 80 years is relevant agricultural, fishery and animal husbandry against Taiwan, such as arsenic, cadmium, mercury, lead and heavy metal pollution. In view of this, the aim of this study is related to the manufacture of heavy metals in water pollution detection mechanism. The current detection mechanism mostly use the more expensive equipment or the use of complex chemical titration step approach to the analysis of heavy metals in aqueous solution. In this experiment, the first generation of wafer-dimensional photonic crystal having a characteristic and by a simple chemical synthesis and surface modification of it in Fourier infrared spectroscopy (FTIR) for detecting signals of heavy metals, and to achieve qualitative and quantitative results. The second generation of photonic crystal wafer as visible light with a wavelength of electrochemical reduction of metal ions to be measured directly in the porous silicon precipitates hole caused large refractive index change, to enhance the signal strength and the detection limit of the effect.
The first two chapters illustrate the application of this study motive and related experiments. Today introduced the relevant heavy metal detection equipment, introduces the basic principles of photonic crystals with porous silicon etching works. The third and fourth chapters compared with experimental design processes and related process steps. Fifth and sixth chapters, compared with results of the discussions and conclusions. Literature review is included in Chapter VII.

並列關鍵字

FTIR ； Porous silicon etching ； heavy metal ion detection ； photonic crystal

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