相位移差分干涉對比式三維形貌量測儀研究與開發

Study and Development of Three-Dimensional Topography Measurement System with Phase Shifting Differential Interference Contrast Technique

余昇剛(Sheng-Kang Yu)

指導教授 ： 林士傑

國立清華大學/工學院/動力機械工程學系/博士(2015年)

https://doi.org/10.6843/NTHU.2015.00450

摘要

近年來光電顯示產品大量使用多種透明材質的基板及表面薄膜結構，為了滿足製程監控與品質的要求，對此類元件有大量的精密量測需求。在生物醫學領域中，對於高透光率的細胞微結構觀察，亦需要定量化且即時的動態檢測技術。因此建立一套可量測透明物件形貌尺寸的光學系統，達成高速、高精度的三維形貌量測技術為一大關鍵。
本研究以相位移式差分干涉對比(Phase shifting differential interference contrast, PS-DIC)技術為核心，結合定量化相位還原演算法開發一套三維形貌量測系統。首先，本研究驗證採用差分干涉對比技術於階高形貌量測的可行性，並提出修正型傅立葉相位積分(modified Fourier phase integration, MFPI)重建演算法，提升重建相位的精確度，降低定量化相位還原過程的誤差，並解決雜訊及邊界條件問題。接著，設計開發一套相位移式差分干涉對比量測系統，並提出誤差補償及校正方法，以提升形貌量測精度。另外，為了加速量測速度以符合即時動態檢測的需求，提出適用於穿透式差分干涉對比量測系統的二步相位移方法來縮短量測流程。最後，探討所開發的光程差量測系統對於測量不同幾何形狀透明待測物的情形及測量生物細胞等樣品的應用。

關鍵字

差分干涉對比術 ； 渥拉斯頓稜鏡 ； 相移術 ； 定量化相位還原 ； 表面形貌 ； 透明物件

並列摘要

Various transparent components are recently used in numerous optoelectronic devices. As to ensure the product quality, there is an increasing demand for precision profile measurement of these transparent objects. For biological application, quantitative real-time phase measurement of cells with high transmittance is also a popular issue. Therefore, developing a three-dimensional topography measurement system with high speed and high precision for measuring transparent specimens become important.
In this study, a phase shifting differential interference contrast (PS-DIC) topography measurement system with quantitative phase restoration method is developed. First, the feasibility of measuring step height specimen through the DIC technique is studied. A modified Fourier phase integration (MFPI) method is proposed to improve the profile reconstruction precision and reduce the effects of noise. Secondly, a PS-DIC measurement system is designed and developed. The error compensation methods and calibration process are also presented. Then a speed up two step phase shifting algorithm is proposed to accelerate the measuring speed of the system for industrial real-time measurement purpose. Moreover, effects of various specimen geometries on profile measurement precision and optical path difference measurement for biological applications are studied.

並列關鍵字

Differential Interference Contrast (DIC) ； Nomarski prism ； phase shifting ； quantitative phase restoration ； topography ； transparent specimen

參考文獻

[1] C. Y. Poon and B. Bhushan, “Comparison of surface roughness measurements by stylus profiler, AFM, and non-contact optical profiler,” Wear, Vol. 190, pp. 76-88 (1995).

[2] X. Jing, X. Ning, Z. Chi, and S. Quan, “Real-time 3D shape measurement system based on single structure light pattern,” IEEE International Conference on Robotics and Automation, Anchorage, Alaska, pp. 121-126 (2010).

[3] L. Carli, G. Genta, A. Cantatore, G. Barbato, L. D. Chiffre, and R. Levi, “Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique,” Meas. Sci. Technol., Vol. 22, 035103 (2011).

[4] B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Inst., Vol. 80, 073706 (2009).

[5] B. Bhushan, J. C. Wyant, J. Meiling, “A new three-dimensional non-contact digital optical profiler,” Wear, Vol. 122, pp. 301-312 (1988).