矽積體光學晶片應用於光收發雙向多工器模組

Silicon integrated photonics for bi-directional optical transceiver module multiplexer

梁曉堯(Hsiao-Yao Liang)

指導教授 ： 李明昌

國立清華大學/電機資訊學院/光電工程研究所/碩士(2011年)

摘要

在市面上，常見的光收發雙向多工器模組，都是利用沉積二氧化矽後再製作成通道波導(channel waveguide)。最後在安裝WDM分光蕊片在蝕刻出來的溝槽中；但隨著想要降低成本並使製程更加簡單，因此如何利用不同的設計亦能達到分光效果便成了件迫切的事情。
本論文為了提供未來光纖雙訊號(或多訊號)傳輸之需求，而利用矽積體光學設計低損耗之光波導和雙向分光器並結合成傳收模組。主要模組元件為漸變式錐形耦合器、脊形波導和多模干涉耦合器，輸出訊號為1310nm的雷射光，接收訊號為多模干涉耦合器另一端的1490nm遠端訊號，所以需利用多模干涉耦合器的鏡像耦合長度特性來分開1310nm和1490nm波段。並用BPM、Fimmwave等光學模擬軟體分別找出基模傳輸、Power loss最小、入射offset tolerance 最大的元件結構。
整個晶片使用FimmWave、BPM、FDTD模擬出上述各個模組元件的最佳尺寸及參數，並使用半導體製程的方式製作晶片，最後再做電性及光學檢測。最後的模組其反應速度可達到10kHz，兩個波長訊號的分光比分別為6:4(1310nm)及9:1(1490nm)，介入損耗大約14dB。

關鍵字

光雙向多工器 ； 光收發

並列摘要

Nowadays, two-way multiplexing optical transceiver modules are key components for passive optical network (PON) and optical interconnect. However, most of the devices are made by packaging active components such as diode laser, photodiodes, TIA and bulk optics like microlenses and WDM filters. A lot of package work and cost of individual components limit the price of each module and the operational speed.
The thesis focuses on developing a two-way dual-plexing transceiver module by using silicon integrated photonics. The main components include taper couplers、 rib waveguide, multi-mode interferometer (MMI), lateral and vertical mirrors, bonded with DFB lasers and photodiodes. The sending optical signal is 1310 nm and the receiving signal is 1490 nm. Firstly, we design a 2-by-2MMI to effectively separate the two wavelengths with a wide transmission bandwidth by using optical simulation software such as BPM and Fimmwave. We also analyze the polarization dependency and temperature sensitivity. Next we design the taper coupler as well as lateral and vertical mirror and estimate the insertion loss.
The device was fabricated in NDL. After the device was fabricated, we bonded laser diodes and photodiodes on the silicon module and measured the electronic and optics performance. The splitting ratio of two wavelengths was 6:4 (1310nm) and 9:1 (1490nm). The measured insertion loss is about 14dB. AC-modulated signals were sent into the device, showing that the device can work properly.

參考文獻

【4】Fabrication of a TFF-Attached WDM-Type Triplex Transceiver Module Using Silica PLC Hybrid Integration Technology,Young-Tak Han, Yoon-Jung Park, Sang-Ho Park, Jang-Uk Shin, Chul-Wook Lee, Hyunsung Ko, Yongsoon Baek,Chul-Hee Park, Yoon-Koo Kwon, Wol-Yon Hwang, Kwang-Ryong Oh, and Heekyung Sung

【5】Thermal Characteristics of a Laser Diode Integrated on a Silica-Terraced PLC Platform; Duk-Jun Kim, Young-Tak Han, Yoon-Jung Park, Sang-Ho Park, Jang-Uk Shin, and Hee-Kyung Sung

【6】A PLC-Based Optical Sub-assembly of Triplexer Using TFF-Attached WDM and PD Carriers; Young-Tak Han, Yoon-Jung Park, Sang-Ho Park, Jang-Uk Shin, Duk-Jun Kim, Chul-Hee Park, Sung-Woong Park, Yoon-Koo Kwon, Deug-Ju Lee, Wol-Yon Hwang, and Hee-Kyung Sung

【9】Jalali, B. and S. Fathpour, "Silicon photonics", Journal of Lightwave Technology, 24(12): 4600-4615, 2006.

【11】M. D. Feit and J. A. Fleck, Jr., “Light propagation in graded-index fiber,” Appl. Opt. 17,3990, (Dec1978).