有機高分子場效電晶體與主動式矩陣顯示器的製程技術研究

Study on P3HT FET and active matrix circuit

江致榮(Chin-Jung Jiang)

指導教授 ： 洪勝富 ； 孟心飛

國立清華大學/電機資訊學院/電子工程研究所/碩士(2006年)

摘要

整合高分子的有機發光二極體和有機場效電晶體在同一個基板，以製作主動式矩陣(active-matrix array)電路，可以採用溶液塗佈成膜，大量節省製程成本，而且基板的選擇性大，可以整合在可撓式基板上，同時有機發光二極體具有高亮度、高對比、低操作電壓等優點，被認為是應用潛力深厚的新興顯示器。本論文主要研究如何使用兩個有機高分子薄膜電晶體和一個電容製作成2T1C主動式矩陣電路在玻璃基板上，並在電路完成後塗佈上有機發光二極體，進而製作成有機平面顯示器。

　　我們使用高分子材料P3HT當作有機場效電晶體的半導體層，使用二氧化矽當作絕緣層，成功地在玻璃基板上製作出載子遷移率(mobility)在10-2(cm2/V-s)，開關電流比(on/off ratio)在104的場效電晶體。我們使用鉻(Cr)當閘極材料以穩定P3HT場效電晶體的良率，改良光罩設計以降低漏電流，用不同塗佈方式和氧電漿(O2 plasma)處理來提高載子遷移率，最後將P3HT場效電晶體運用在主動式1T1C電路上，並成功地操作其充電及放電行為在頻率10Hz、100Hz、500Hz和1KHz，在頻率1KHz時可以得到開啟時間最快可到0.3(ms)。

關鍵字

有機薄膜電晶體 ； 主動式矩陣畫素 ； P3HT ； 載子遷移率 ； ON/OFF ratio

並列摘要

Integrating polymer light-emitting diodes (LED) and polymer field-effect transistors (FET) on one substrate to fabricate 2T1C active-matrix array circuit by solution process can reduce the cost substantially. The polymer devices can be fabricated on various substrates, such as flexible substrate. Additionally, organic LEDs are regarded as the potential technology in display with advantages of high brightness, high contrast, and low operating voltage.

We use P3HT as semiconductor, use SiO2 as insulator, and successfully fabricate FET with mobility of 10-2 (cm2/V-s) and on/off ratio of 104 on glass substrate. To increase reliability of P3HT FET, we use chromium as gate material. To lower leakage current, we design new mask. We also use different coating methods and O2 plasma treatment to enhance mobility. Eventually, we applied P3HT FETs to 1T1C active-matrix circuit and obtained successful operation of charging and discharge in this 1T1C circuit at 10Hz, 100Hz, 500Hz, and 1KHz. The fastest rise time is 0.3 (ms).

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