利用靜磁力與勞侖茲力驅動雙軸循序掃描面鏡

Dual-axis Raster Scanning Mirror Driven Using Magneto-static Force and Lorentz Force

湯宗霖(Tsung-Lin Tang)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2007年)

摘要

本論文利用微機電技術設計與製造一種新式的微型掃描面鏡，該元件主要整合靜磁力與勞侖茲力，以超距力的方式來驅動元件，鏡面結構上不需要任何複雜的電流繞線與絕緣層，並可達到循序掃描的規格。本文針對致動的設計進行理論推導與分析，除了比較不同驅動機制的差異，並與元件實驗量測的部分，相互印證。除了成功的致動元件之外，本論文也探討應用於投影顯示時的一些元件特性，其中包括操作環境對鏡面扭轉共振頻的影響、驅動訊號波形對元件的影響與掃描起始點的控制問題。此外，本論文進一步利用所製作出來的雙軸掃描面鏡進行一簡單的文字投影，驗證其應用於投影顯示之可行性。

關鍵字

靜磁力 ； 勞侖茲力 ； 感應電流 ； 掃描面鏡

並列摘要

This thesis reports novel coil-less micro scanning mirrors driven by the magnetostatic force resulted from magnetic interaction as well as the Lorentz force induced by eddy current. This design eliminates complicated coil routing and insulation layer deposition, and simplifies fabrication allowing easy integration with micromachining and CMOS processes. Bulk micromachined 1-axis and 2-axis scanning mirrors are demonstrated, displaying 1D and 2D scanning patterns. The 2D scanning patterns are easily tuned by varying the combination of driving frequencies. The results show that the diamagnetic (Cu) mirror is mainly driven by the eddy current induced Lorentz force, while the ferromagnetic (Ni) mirror is mainly driven by the magnetostatic force.

並列關鍵字

Magnetostatic force ； Lorentz force ； Eddy current ； Scanning mirror

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