可調變反射式電漿子濾光結構之應變機制優化

Straining Mechanism Optimization for Tunable Filter Based on Reflective Surface Plasmon Resonance

胡鈺堂(Yu-Tang Hu)

指導教授 ： 羅丞曜

國立清華大學/工學院/奈米工程與微系統研究所/碩士(2018年)

摘要

本研究主旨在於開發在塑膠基板上製作週期性排列的金屬奈米結構之製程，並透過對基板施以等向性拉伸的方式改變奈米金屬結構的排列週期、調變奈米金屬的表面電漿共振，達成單一初始表面電漿子共振(Surface Plasmon Resonance, SPR)濾光設計卻支援多種濾光效果的目標。本研究基於前期研究之設計基礎，開發電子束微影、真空鍍膜、熱壓轉印及彈性形變等製程，驗證以應變切換SPR 濾光效果的可行性。結果證明在5%應變下，小週期的藍色SPR 逐漸切換成綠色SPR，證實提案設計使用於濾光片及顯示系統之應用。
此外，本研究亦詳細評估了等向應變於有機材料在非等向拉伸時之範圍，並以決定係數觀察SPR 之週期變化，最終量化等向應變之區域，除了說明SPR 的應用範圍之外，亦暗示了應變對SPR 濾光色純度之貢獻。

關鍵字

表面電漿共振 ； 熱壓奈米轉印 ； 濾光調變

並列摘要

This research presents a method for transferring nanostructures to
plastic substrate via thermal imprint, and by providing isotropic strain on the plastic substrate to modify the patterning pitch of the periodic nanostructures on top, switching of SPR color performance with a single initial structure design was successfully demonstrated. This research inherits the design basis from previous works, and developed the complete process of e-beam lithography, vacuum metal deposition, thermal imprinting, and isotropic deformation technique. Finally proving the possibility of tunable SPR color filtering, by demonstrating the switching of the initial periodical structure that shows blue SPR, into green SPR with 5% strain, hinting at the application for color filters and display systems.
Additional analysis of isotropic strain boundary when a plastic substrate is under anisotropic strain is also investigated. The coefficient of determination was used to observe the patterning period of SPR structures, defining the outermost location of isotropic strain region and providing the IV application area limit of SPR color filter. This analysis also hints at the effects of strain on SPR color purity.

並列關鍵字

Surface plasmon resonance ； Thermal nanoimprint ； Tunable color filtering

參考文獻

[1] Harris R. Miller, “Color Filter Array for CCD and CMOS Image Sensors Using a Chemically Amplified Thermally Cured Pre-dyed Positive-Tone Photoresist for 365-nm Lithography,” Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, 11 June 1999.

[2] Yi-Pai Huang, Fang-Cheng Lin, and Han-Ping D. Shieh, “Eco-Displays: The Color LCD's Without Color Filters and Polarizers,” Journal if Display Technology, Vol. 7, No. 12, December 2011.

[3] Xing-Fei He and Frank Fang, “Flat-Panel Color Filter Inspection,” Vision Systems Design, 1 May 2011.

[4] Mu-Hsing Wu, Chiou-Shann Fuh, and Hsien-Yei Chen, “Defect Inspection and Analysis of Color Filter Panel,” Inspection of Color Filter Panel, Vol. 6, No. 2, 2000.

[5] Xing-Fei He and Frank Fang, “Line Scan Cameras Enable High Speed Inspection of Color Filters within Flat-Panel Display,” Teledyne DALSA, Waterloo, Canada, 2011.