新型介面熔絲記憶體元件之探討

The Study of A High Scalable Interface Fuse (iFuse) for Advance CMOS Logic Technology

楊立宇(Li-Yu Yang)

指導教授 ： 林崇榮 ； 金雅琴

國立清華大學/電機資訊學院/電子工程研究所/碩士(2011年)

摘要

在本論文中，提出一種新型的介面熔絲元件(interface Fuse，iFuse)，此介面熔絲元件具有低功率、低電流編程及低壓操作，且可適用於各種先進邏輯製程而不需要額外光罩及製程等特點，此元件由金屬到接點(Contact)間之介面或接點到多晶矽間之介面所組成，其可以擁有比其他一般電子熔絲還要低的編程電流。而本論文中針對介面熔絲提出了兩種具有可行性的佈局架構，平行式介面熔絲與對角式介面熔絲，平行式架構可有效解決製程光罩對準偏差的問題，而對角式架構及採用光學鄰近效應修正則可更進一步降低元件之編程電流。

關鍵字

熔絲 ； 介面熔絲

並列摘要

In this paper, we proposed a novel interface Fuse (iFuse) for low power electrically programmable fuses in advanced CMOS applications. With an offset-landed metal to contact or contact to poly-silicon structures, the iFuse can be programmed by substantially reduced current as compared to conventional fuses. A diagonal contact layout and the optical pattern correction scheme can further improve the cell stability as well as its programming characteristics.

並列關鍵字

Fuse ； iFuse

參考文獻

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