具奈米結構金屬薄膜於感測器之應用

Nano-texture Metal Thin Film for Sensors Applications

葉仁豪(Jen-Hao Yeh)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2012年)

摘要

本研究利用奈米多孔隙陽極氧化鋁模板轉移技術製作新型感測器，利用此一技術設計、分析與製作新型壓阻式感測器之應用，分別為溫度感測器、應變感測器及曲率感測。而現今微機電系統 (Micro-Electro-Mechanical System, MEMS) 技術，主要是利用半導體微製程技術製作微元件於矽基板之上，而近年隨著尺度趨於縮小進入奈米結構尺寸，傳統製作奈米結構設備昂且鎖時成為製作奈米元件的最大問題。因此本文整合金屬薄膜沉積於奈米多孔隙陽極氧化鋁模板形成奈米質地結構於矽基板及PET可撓性基板上，用於開發新型感測特性之感測器，透過金屬薄膜沉積於陽極氧化鋁薄膜上形成奈米質地結構作為壓阻感測特性，並利用二階段陽極氧化法製程技術以及微奈米加工術方法改善可撓性基板之金屬薄膜附著性。本研究成功的開發新型壓阻感測型式之壓阻式感測器，並對於新型溫度感測器、應變感測器及曲率感測進行特性分析與模擬驗證，未來可做為後續研究新型低溫製程壓阻式感測器之起端。

關鍵字

陽極氧化鋁 ； 溫度感測器 ； 應變感測器

並列摘要

This study, we present nanoporous anodic aluminum template transformation technique to fabricate novel sensor. Using this technique to design, analysis and fabricate novel pizeoresistance sensors. They are temperature sensor, strain sensor and bending curvature sensor. Now the day, the technology of Micro- Electro- Mechanical System (MEMS) is primary using the semiconductor manufacture technology to manufacture micro system on silicon substrate. These days, with scale is going down to nano scale structure, the facilities of traditional manufacture in nano structure are expensive and spend lots of time becoming the largest problem in manufactory nano devices. Therefore, in this paper, we integrate metal thin film deposited on np-AAO template formatting nano-texture structure on silicon substrate and flexible PET substrate to develop sensor of novel sensing characteristics. By using two step anodizing fabrication process and micro/nano fabrication process to improve the adhesion between flexible substrate and metal thin film. This study has been succeed developed novel type of pizeorsistane of pizeoresistance sensor. The novel temperature sensor, strain and bending curvature have been analyzed characteristic and simulation verified. In the future, it could be used for novel low temperature fabrication process for pizeoresistance sensors in the future.

參考文獻

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