透明可撓式觸覺感測器之設計製作與特性分析

Design, Fabrication and Characteristic Analysis of Transparent Flexible Tactile Sensor

陳尊義(Tsun-Yi Chen)

指導教授 ： 陳榮順 ； 羅丞曜

國立清華大學/工學院/動力機械工程學系/博士(2014年)

摘要

近幾年來，軟性電子技術成為世界各國爭相發展的重點技術之一，其具有重量輕、製程容易、大面積、可撓曲、耐衝擊以及成本低等優點，使電子產品的應用領域得以進一步的擴展。然而在軟性電子的發展中，以顯示器及感測器的發展速度最快，原因為目前顯示器的需求與應用日益增加，觸控面板亦成為未來的趨勢。本論文研究觸覺感測器的設計與製作，並期望能應用於軟性顯示器，將此感測器當作一控制搖桿，藉以操控三維虛擬影像。
本論文設計一觸覺感測器，設計概念為以四個電極為一個感測單元，其特點為全透明、可撓曲、可使用任何物體觸碰、並支援多點觸控；功能可檢測正向力、側向力、拉力等功能，本論文亦提出「摩擦力協助(Friction-Assisted)」的拉力概念，使操作者可以摩擦力的方法施加拉力。最終期望將本元件應用於軟性顯示器上，將之當作一控制搖桿，並利用本論文提出之拉力感測機制，操控三維虛擬影像，將影像作平移、旋轉、推入以及拉出等動作，使得人類與影像之互動更接近人體實境的效果。
本研究首先先對元件建模，並以軟體模擬元件之受力結果，再利用黃光微影、蝕刻、濺鍍、翻模、對準以及黏合等製程技術，完成觸覺感測器。本論文亦設計並實現後端讀出電路，最後架設實驗架構量測元件，以驗證觸覺感測器的設計概念。而本論文亦分析觸覺感測器在曲面下之特性，探討曲率半徑與初始電容值之關係，以及元件在曲面下之靈敏度變化，對可撓性做更加深入的探討。

關鍵字

觸覺感測器 ； 軟性顯示器 ； 可撓透明 ； 拉力感測

並列摘要

Recently, flexible electronics technology becomes more and more attractive in industry, due to the advantages of light weight, easy fabrication, large area, flexible, sustain shock and low cost. The applications of flexible electronic have been widely found, especially in flexible display and tactile sensor. Therefore, we designed and fabricated a novel tactile sensor for a joystick and hope it can be applied on flexible display to control 3D virtual image.
In this thesis, a novel flexible and transparent tactile sensor which consists four capacitors in one sensing cell, is proposed with the desired properties: flexible, transparent, able to be touched by any objects and support multi-touch. The concept of the developed sensor is able to detect normal, shear, and pulling forces. The pulling force can be detected since friction-Assisted pulling force is implemented in the proposed sensor. The long-term goal of this study is using the normal, shear, and pulling force to control the 3D image and is applied to a flexible display.
The model of the sensor is first established, then the commercial software is utilized to simulate the behavior and to test the performance of the device. Fabrication such as photolithography, deeply etching, sputter, demold, alignment and bonding are processed to produce the sensor. The readout circuit is designed and realized, and the experiment is setup to verify the design concept of the proposed sensor. Furthermore, the bending characteristic of flexible tactile sensor is also analyzed. The relationship between bending radii and initial capacitance is studied and the performance of tactile sensor under different bending curvature is also investigated.

並列關鍵字

tactile sensor ； flexible display ； flexible and transparent ； pulling force detection

參考文獻

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