集束型半導體製程設備之三層式遠端監控系統(客戶端)

Three-Tier Internet-Based Remote Monitor and Control System for Cluster Tools (Client End)

梁仁澤(Jen-Tse Liang)

指導教授 ： 鍾文仁

中原大學/工學院/機械工程研究所/碩士(2002年)

https://doi.org/10.6840/cycu200200607

摘要

本研究目的在於建立一套三層式的遠端監控系統，並將之成功地套用在集束型半導體製程設備上。使用者只需要利用一般的網頁瀏覽器，透過網頁上的功能選單就可以達到操控遠端機械設備的目的；再搭配上動態模型與網路攝影機，進行設備動作情形的驗證與比對。設備端則是提供一界面可取得設備即時狀態並繪圖展示；與客戶端之間的溝通方式，可透過資料庫將客戶端存儲的命令解碼成機械手臂的控制命令碼。
本系統以Visual Studio .NET為開發工具，使用的程式語言包含ASP.NET、C#以及JScript等；資料庫系統則是選擇SQL Server 2000；作業系統以Microsoft Windows XP為主要的測試平台。被控端設備為一款由JEL公司所出品的EHR 3000 Series之三軸SCARA(Selective Compliance Assembly Robot Arm)型式的真空潔淨手臂，通訊介面是以RS232/485的方式來傳輸。
本文分為兩大部分進行討論，第一部份針對三層式遠端監控系統之客戶端加以整理說明，內容包含三層式架構的簡介、集束型半導體製程設備的簡介、網頁的規劃與製作、動態模型的設計與建立、資料庫的設計與系統功能介紹。第二部份則介紹集束型半導體製程設備三層式遠端監控系統的整體架構與規劃，內容包括三層式遠端監控系統的介紹、客戶端的架構與發展、伺服端的架構與發展、設備的架構與發展以及系統的整合與驗證。

關鍵字

三層式架構 ； 集束型設備 ； 網際網路 ； 真空機械手臂 ； 遠端監控系統

並列摘要

The purpose of this project is to establish a three-tier remote monitor and control system for Cluster Tools. Contrary to common understanding, this system will make users able to control the robot equipment through the control list on the webpage with ordinary Web browser. Besides this, it cooperates with an animated model and a web-cam to test and verify the equipment condition. In server end, it provides an interface which is capable of getting immediate equipment condition and demonstration. As to client end, this server can access data from database and decode it into the command code of the robot.
This system is developed with Microsoft Visual Studio .NET. Programming languages include ASP.NET, C#, and Jscript. Microsoft SQL Server 2000 is the database with Microsoft Windows XP as operating system. RS-232/485 is used to be communication interface of a SCARA (Selective Compliance Assembly Arm) robot (EHR 3000 Series, JEL Corporation).
This thesis includes two parts; the first section aim to the client end of this system contents an introduction of three-tier structure, Cluster Tools, webpage plan and program, model design and establish, database design and system functions. The second section give a brief of the system structure, including the introduction of three-tier remote monitor and control system, the framework and development of client end, server end and equipment end; furthermore, the integration and verification of the system.

並列關鍵字

Cluster Tools ； Internet ； Remote Monitor and Control System ； Three-tier ； Vacuum Robot

參考文獻

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