半導體集束型設備之遠端監控/診斷系統的設計開發

Design and Development of Remote Monitoring and Diagnosing System for Cluster-Tools Equipment

呂國璋(Kuo-Chang Lu)

指導教授 ： 鍾文仁

中原大學/工學院/機械工程研究所/碩士(2003年)

https://doi.org/10.6840/cycu200300751

摘要

單一晶圓製造方式之集束型設備(Cluster-Tools Equipment)在半導體製造廠中，因具有低污染、佔地面積小及經營成本低之優點，已成為前段設備架構的主流；而設備自動化在半導體廠晶圓輸送自動化中是重要的關鍵層級之一；因此為了有效的監控生產設備的狀況，運用設備及感測器的訊息資料來記錄設備狀態並提供設備之異狀偵測預警，將有助於預防設備異常所造成設備本身的危害，進而提高生產流程的穩定。配合遠端監控/診斷的技術，可以在不需要直接接觸設備的情況下進行設備的遠端診斷、遠端控制，以方便設備的維護；而發生機械故障時，工程師也可透過Internet了解問題所在，並即時決定應變措施，以減少錯誤修復時間。
本文針對半導體集束型設備之遠端監控/診斷系統進行研究開發；第一部分以國際SEMATECH標準之電子診斷架構與三層式之架構為規範，進行應用於半導體集束型設備之三層式遠端監控/診端系統的架構設計；第二部分則以Microsoft .NET Framework為開發平台，進行遠端監控/診端系統的開發，並建立實際的集束型設備實驗平台，來驗證與實現遠端監控/診斷的能力。

關鍵字

集束型設備 ； 電子診斷 ； 遠端監控

並列摘要

Cluster-tools equipment has been the main stream of front-end equipments in semiconductor manufacturer for less pollution, small footprint, and low cost ownership. Moreover, equipment automation is key level in wafer transport automation of cluster-tools for semiconductor manufactory. In order to monitor equipment production statuses effectively, it is beneficial for damage prevention of equipment to enhance manufacture stability by using message data of equipment and sensors. With remote monitoring techniques, users can control and monitor the equipment through Internet anywhere at any time. When equipment has any problem, engineer can resolve them through Internet and avoid possible further damage.
Design and development of remote monitoring and diagnosing system for semiconductor cluster-tools equipment are proposed in this article. The architecture design of remote monitoring and diagnosing system is discussed base on International SEMATECH e-Diagnostics and three-tier application concept in the first section. In the second section, Microsoft .NET Framework platform is used for system development and constructed cluster-tools experimental platform of this study is used to verify and realize remote monitoring/diagnostics capabilities.

並列關鍵字

Remote Monitoring ； e-Diagnostics ； Cluster Tools

參考文獻

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[2] H. Wohlwend, “e-Diagnostics Guidebook Version 1.5”, International SEMATECH, October 4, 2002.