整合晶圓廠設備與物料搬運系統之派工研究

A Study of Integrated Dispatching Rule of Equipment and Material Handling System in Wafer Fabrication

田錦宏(Jonah-C. Tyan)

指導教授 ： 陳建良

中原大學/工學院/工業工程研究所/博士(2004年)

https://doi.org/10.6840/cycu200300769

摘要

摘 要
由於模式建立的複雜度，晶圓廠設備與物料搬運系統之派工問題通常是獨立分開進行研究。在這個研究中，作者採取整合模式建構法來進行晶圓製造流程與物料搬運系統的自動化整合，並模擬十二吋晶圓廠之製造環境下進行派工策略研究。為了要開發一套整合設備與物料搬運系統之派工法則，首先發展出以限制理論為基礎之因應狀態派工方法論，並以總產出、週期時間、在製品數量與交期達成率為系統績效指標。然後再以整合模式建構法將物料搬運系統功能結合到晶圓製造模組中而整合成一個全廠自動化之虛擬晶圓廠。接下來建構一個整合機台與晶圓搬運車台之派工法則來同時衡量多個績效指標。整合型之派工法則是以先前所發展之因應狀態派工方法論為基礎，並導入多重反應最佳化程序建構而成。為要驗證整合型派工法則之績效表現，根據現有晶圓廠設備與製程發展一個虛擬晶圓廠進行個案研究。個案研究的系統績效指標設定為週期時間、在製品數量、交期達成率與晶圓運送時間。實驗的結果發現整合型派工法則的績效表現優於現有之靜態派工法則，在晶圓運送時間這一項改善約 15% 而其他指標有 5% 的進步。

關鍵字

12吋晶圓製造 ； 多重反應最佳化 ； 反應曲面設計 ； 派工研究 ； 自動化物料搬運系統 ； 因應狀態派工方法論 ； 限制理論 ； 整合模式建構法

並列摘要

ABSTRACT
The dispatching problems of tool and material handling in wafer fabrication are normally investigated independently due to the complexity of modeling. In this study, the integrated modeling approach involved automation of both manufacturing processes and material handling systems is conducted to evaluate dispatching strategies in a large-scale 300 mm wafer fabrication environment. In order to develop an integrated dispatching rule, a state-dependent dispatching methodology based on the theory of constraints is first developed to improve the overall system performance consisted of throughput, cycle time, work-in-process, and due-date performance. Then a material handling system is incorporated to construct a fully automated fab by using integrated modeling framework. Subsequently, the author presents an integrated tool and vehicle (ITV) dispatching strategy to consider multiple performance measures in a fully automated fab environment. The ITV dispatching strategy is developed using a state-dependent methodology and multiple response optimization. A case study based on a local fab is described to examine the performance impact of the ITV dispatching rule measured by cycle time, work-in-process, on-time delivery, and lot delivery time. The results of the simulation experiments and analysis show that the ITV dispatching rule is superior to the use of a static dispatching rule, consisting of an average of 15% improvement for on-time delivery and 5% for other performance measures.

並列關鍵字

automated material handling system ； response surface design ； integrated modeling ； state-dependent methodology ； dispatching studies ； multiple response optimization ； theory of constraints ； 300 mm wafer fabrication

參考文獻

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