廠務空調系統在半導體及TFT LCD (Thin Film Transistor Liquid Crystal Display) 面板製造廠中不僅僅為維持穩定的潔淨室環境,同時也負責所有製程設備之熱交換及散熱循環,使得產線能夠維持每天24小時不間斷的運轉,扮演著舉足輕重的角色。近年來台灣高科技產業廠房林立及需求不斷增加,用電量也隨之增加的情況之下,如何使空調系統有效率的運轉,以達到節約能源的目標,在台灣地區地狹人稠的特性和全球能源短缺的趨勢下,也更加顯示其急迫性與重要性了。 冰水主機是整個空調系統的心臟,也是用電量最大的單一機件,在廠務空調系統中,冰水主機最主要的功能就是製造冰水,供給下游設備熱交換及散熱循環,維持製程產線的環境與機台設備需求。本文即針對冰水主機之蒸發器與冷凝器部分探討與研究,以理論分析水側溫度變化對於冰水主機運轉效率之影響,並以冰水主機原廠電腦選機軟體YORK MILLENNIUM CENTRIFUGAL CHILLER SELECTION PROGRAM (REV. V6_18.I.D.D) — WINCHILL (V7_26.FDW) 模擬實際狀況,分析探討計算數據。本研究發現當蒸發器水側溫度提升或冷凝器水側溫度降低時,都能使冰水主機運轉效率提升,減少能源的浪費;而在實際的應用,在管理廠務空調冰水系統運轉時,即可藉調整蒸發器與冷凝器之水側溫度來達到降低運轉成本的目標。
In semi-conductor and TFT LCD industry, facility HVAC system not only maintains stable clean room environment, but also be responsible heat exchange and heat transfer circulation for all process equipments. The system plays a decisive role in enabling the production line to run continuingly day and night. Recently, as factory of hi-tech industry buildings establishment, the demand of electric power increases. With the characteristics of sparse power sources and the trend of dense population in Taiwan, the aim to make air conditioner more effective and economical becomes urgent and important. The chiller is not only the heart of HVAC system, but consumes the most electric power in single component. In facility HVAC system, the functions of the chiller include the production of chilled water, supplement of downstream equipments of heat exchange and heat circulation, the demand of the process production line environment and equipments. The dissertation is to study the evaporator and condenser of the chiller, and to analyze the influence of the variety of temperature to the efficiency of the chiller theoretically. Moreover, the study simulates actual situation with the software YORK MILLENNIUM CENTRIFUGAL CHILLER SELECTION PROGRAM (REV. V6_18.I.D.D) — WINCHILL (V7_26.FDW) to calculate statistics. The study finds that as the temperature of evaporator increase or the temperature of condenser decrease, the efficiency of the chiller promotes. In practice, for facility HVAC system management, to reach the goal of decrease the cost of system operation, we can adjust the temperature of fluid to the evaporator and the condenser as the chiller is operating.