集束型設備之遠端性能監控與自動回報功能的探討

隨著半導體設備工業的成熟與快速的成長，各家廠商相互競爭，必須對所有資源做有效的運用，並且希望能夠減少操作員因為心情或者技術而導致失誤的發生，所以要如何才能更有效的減低成本、減少失誤率是各公司都想要達成的目標。 Web Service，即為網路上所提供的服務，可提供計算或者查詢的功能，Web Service的呼叫與回應均使用SOAP作為傳輸的標準，讓其可以不限制任何語言，任何語言將可以呼叫使用；工程師可將各系統中共有的程式，寫成Web Service當中，更能讓各伺服器中的程式簡化，並且減輕其他伺服器的負擔。設備會因為持續使用而產生金屬疲勞，也會因為在嚴苛的環境中而造成更多的問題，若程式自動警告工程師，設備將會有異狀產生，工程師就可以提早排定時間作維修，將可以大大減少設備出現問題，進而增加公司競爭力。本研究共同運作SQL Server系統與Web Service系統後，Web Service確實比SQL Server更能處理更多的事情，能夠減輕Web Server運算負擔，因此Web Service對於整體架構上的改進擁有相當大的影響；另外利用影像辨識後計算手臂前端高度，然後將資料使用統計製程管理的方式，得到設備的能力指標，並得知目前設備的狀態，提前通報工程師提前做檢修的工作，避免當錯誤發生後才會得知的情況，以達到電子診斷中的預報功能。

關鍵字

遠端監控；統計製程管制；網路服務；電子診斷

並列摘要

With the rapid growth of semiconductor equipment industry, competition among companies is tense. Each company must make the best use of their own resources, and hopefully reduce mistakes made by moody or unskillful operators. How to lower costs and reduce retrieval error ratio effectively is the goal which every company wants to reach. Web Service, a server which supplies services on the Internet, providing the calculating and inquiring functions. The request and response of the Web Service both use SOAP be transmission standard. It allows most languages to be requested by the Web Service. The engineer can transmit the entire common program to become Web Service. It can simplify the program in each server and lighten the load of other servers. Equipments will appear metal fatigue out of continuous working. It will also bring more problems in the tough environment. If the program can automatically warn the engineers of the unusual situation about the equipment, then they can check and fix the equipment in advance. It will decrease the problems of equipment and, on the other hand, increase the efficiency for the company. After this study works two systems (SQL Server and Web Service) together, we know that the Web Service can actually handle more work than the SQL Server system. It helps the web server to calculate. Therefore, Web Service has great influence on improving the system structure. The program will recognize the image and calculate the height of the front arm. Then, it uses statistical process control to get process capability about the equipment. It will show the operators the status of equipment. They can call the engineers to check and fix the equipment in advance, when the index displayed a decrease tendency to avoid an accident. It will achieve the capability of e-Diagnostics Prediction.

並列關鍵字

Remote Monitoring ； Statistical Process Control ； e-Diagnostics ； Web Service

參考文獻

[5] K. C. Lu, “Design and Development of Remote Monitoring and Diagnosing System for Cluster-Tools Equipment”, Master Thesis, Chung Yuan Christian University, Taiwan, 2003.

[1] M. Wolischlaeger, P. Neumann, T. Bangemann, “Web Services for remote maintenance of fieldbus based automation systems”, IEEE AFRICON Conference, Vol.1, pp.247-252, 2002.

[3] M. H. Hung, K. Y. Chen, and S. S. Lin, “Development of a Web-Services-based remote monitoring and control architecture” IEEE International Conference Robotics and Automation, Vol.2, pp.1444-1449, 2004.

[4] M. H. Hung, F. T. Cheng, and S. C. Yeh, “Development of a web-services-based e-diagnostics framework for semiconductor manufacturing industry”, IEEE Transactions manufacturing industry Semiconductor Manufacturing, Vol. 18, No. 1, pp.122 – 135, 2005.

[6] S. M. Hanna, “Application of Statistical Process Control (SPC) in the manufacturing of medical accelerators”, Particle Accelerator Conference, Vol. 2, pp. 1077-1079, 2003.

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集束型設備之遠端性能監控與自動回報功能的探討

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