藍光碟片模仁製作過程中各項製程對 微結構與粗糙度影響之研究

Study on the Influence of Process Parameters at Different Stage on Micro Features and Roughness of Blu-Ray Disk Stamp During Manufacturing

朱旭中(HSU-CHUNG CHU)

指導教授 ： 陳夏宗

中原大學/工學院/光機電及資電控產業研發碩士專班/碩士(2007年)

https://doi.org/10.6840/cycu200700035

摘要

本研究針對以DVD製程進行藍光碟片模仁的製作，過程中找出影響藍光碟片模仁微結構與粗糙度之各階段製程參數與原因，以進而掌握藍光碟片之模仁製造技術，並提高良率與光碟品質。
在研究中分別控制顯影的時間、濺鍍的時間、電鑄的電流、離子清洗的時間，探討其各製程對藍光碟片模仁微結構和粗糙度的影響。實驗是以準分子雷射刻版機在塗佈光阻之玻璃上曝光，然後再利用微電鑄技術在微溝軌中生長成純鎳之金屬微結構。在實驗中顯示顯影製程和離子清洗製程中，改變清洗時間數秒鐘就足可影響到微結構精度和粗糙度的變化，而濺鍍製程和電鑄製程中也顯示出時間與電流加長，會對模仁表面粗糙度有增大的趨勢。所成型的藍光碟片模仁之微結構和粗糙度是以AFM進行表面輪廓分析，結果顯示在微結構成型的顯影和離子清洗製程中，可很明顯的看出在時間太短或太長時，都會造成微結構成型不良的影響，在量測粗糙度則是發現到顯影和離子清洗製程是時間愈長，粗糙度則愈好，而濺鍍與電鑄製程則反而是時間愈短，粗糙度則愈好之現象。
從此實驗中也可了解到在顯影時間設定在20秒左右，濺鍍時間設定在450秒左右，電鑄電流設定在50安培左右，離子清洗則設定在80秒左右，可得到品質最好的藍光碟片模仁。

關鍵字

藍光碟片 ； 模仁

並列摘要

This study is focusing on the process influence when making the blu-ray disc stamp. Including the micro-structure and roughness of the blu-ray disc stamp are the key issues of the stamp quality.
The experiment parameters have developing time, sputtering time, electroforming current and the ion aching time. The contribution of each parameter to the micro-structure and roughness has been discussed and investigated. The experiment steps have: 1. expose the photoresist by the excimer laser mechine. 2.use ion aching the photoresist to develop the micro structure. 3.sputter the conductive layer. 4.dipping in electroforming machine.
The results show that the developing and aching process have great effect on the micro-structure and roughness. The sputter time and the electroforming also have relatively effect on the roughness of the stamp. As analyzing the micro-structure and roughness of the stamp by the atomic force micrometer, the result indicated that the developing aching process have key effect on the groove width and groove angle. But all the processes have the effect on the roughness.
We find that the optimal blu-ray disc stamp making process could be as following: the developing time set to 20 seconds, the sputtering time set to 450 seconds, the current of electroforming process set to 50 ampere , and the ion aching time set to 80 seconds.

並列關鍵字

Blu-Ray Disc ； Stamp

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