薄膜電晶體液晶顯示器彩色濾光片之欠陷分析

本技術報告主要是探討『TFT-LCD 關鍵零組件之彩色濾光片，在各個製程的瑕疵分析與分類』。近年來由於面板被大量使用，使得其需求量大增，因此所有面板廠無不增加面板產量和研發新尺寸。然而於面板製造流程中，面板常會因外在環境及機台本身因素而出現瑕疵，造成面板良率下降、成本增加，為了改善此問題，目前面板廠皆設有線上檢查機制，即在製造流程中進行玻璃基板抽樣檢查的工作，以防止大量不良面板之發生。但目前的檢查機制僅能進行抽檢動作，且皆為人工處理。為了取代人力、增加處理速度，讓面板進行全檢並即時傳送相關資訊給線上工程師，有必要導入即時且自動化之檢查機台系統。因此本技術報告將介紹彩色濾光片的製作流程，並且針對各個製程瑕疵成因進行解析，希望能對將來『自動化欠陷分類系統』缺陷資料庫的建立有所助益。

關鍵字

欠陷分類；液晶顯示器；彩色濾光片

並列摘要

The technical report is to explore “key components of TFT-LCD color filter’s defect analysis and classification in various manufacturing process”. In this report, we will introduce the panel that in recent years has been a lot of use, makes its demand increased, so panel manufacturing plant to increase production and research and development of large size panels. However, the panel defects generated due to manufacturing environment and machine’s stability, resulting in panel yield fell, the cost increased .In order to improve this problem, In-line MQC mechanisms are established that glass substrates are inspected by a randomly sampling ratio in manufacturing process to prevent the occurrence of a large number of unqualified panels. But the current in-line MQC mechanisms are operated under a sampling ratio and are handled manually. To reduce human power, increase processing speed, inspect entire glass substrates and pass relative information to the online engineers immediately. Therefore, it is necessary to introduce automatic inspection machine system. for this technological report will introduce color filter process Then the equipment of the process and the defect cause will be analyzed. In the end, the test result of the “auto defect classification system automation will be the database