雙肘節式精微工具機之研發與運動特性及誤差分析研究

Development of A Double-Toggle-Type Micro Machine Tool and Motion Characteristic and Error Analysis

陳昱鼎(Yu-Ding Chen)

指導教授 ： 王世明

中原大學/工學院/機械工程研究所/碩士(2010年)

https://doi.org/10.6840/cycu201001065

摘要

精密製造技術發展中，由於目前生產之微小零組件有3D複雜加工以及材料應用多樣化等需求，而精微工具機則為Non-MEMS精微製造技術中的重要應用設備。研究中提出以雙肘節式組態原理，作為雙肘節式工具機之傳動媒介，改善單肘節式機構在運動時在不同行程會有進給解析度差異的現象，再以低成本、穩定進給解析度為設計出發點，研發雙肘節式精微工具機。為了符合產業應用需求，研發之機台具有額外X、Y軸向大行程驅動軸，可滿足於機上進行數個精微量產加工之需求。研究中首先設計雙肘節式機構組態，推導出雙肘節式機構運動方程式，據以分析雙肘節式機構各項運動特性，以作為機構設計之依據。研究中也利用CAE分析對主要結構進行結構優化設計與模擬分析，使整機結構擁有良好的靜/動態剛性。最後，透過齊次座標轉換矩陣，建立之雙肘節式工具機之整機運動模型，再定義雙肘節式工具機誤差源，建立雙肘節式工具機之體積誤差模型，並作誤差靈敏度分析，分析各主要誤差源對於機台加工精度的影響。

關鍵字

靈敏度分析 ； 精微工具機 ； 雙肘節式平台 ； 結構優化分析

並列摘要

The micro machine tool plays an important role in micro manufacturing. In the study, the double-toggle-type mechanism which can provide consistent feed resolution for full travel length was proposed. In order to meet the needs of mass production, the micro machine with double-toggle-type configuration has additional two servo systems for x- and y-axis long range travel. The kinematic equation of the double-toggle-type mechanism was derived and used to analyze the kinematic characteristics of the mechanism. For the optimal machine structure, modal analysis and dynamic compliance analysis were conducted with using CAE technology. Finally, the error model of the designed micro machine tool was derived and sensitivity analysis was conducted to explore the influence of the major error sources on machine’s accuracy..

並列關鍵字

micro machine tool ； double-toggle-type ； error model ； sensitivity analysis

參考文獻

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