- 學位論文
共平面多自由度臥式精微工具機設計分析
Design and Analysis a horizontal micro machine tool with a co-plane multi-DOF plantform
摘要
因應微小零組件製造有3D複雜形狀以及材料應用多樣化等需求，非微機電精微製造是一重要的現代技術，精微工具機是此技術的關鍵設備。研究中設計一共平面多自由度平台，相較於傳統機構其不需以序列式堆疊的方式，其是以三組斜向伺服機構搭配旋轉軸承，以環型陣列方式排列，藉由控制複數驅動軸，可使平台擁有X、Z及B三軸向之自由度。平台傳動機構是將滾珠螺桿與滑軌呈幾何三角關係擺放，使平台可得更精細之進給量和更好解析度。此外，研究也在平台基座上有效利用空間設計雙立柱，並將主軸安裝於上，使其擁有Y軸向自由度，完成製作一共平面多自由度臥式精微工具機之原型機。研究中建立運動方程式並分析工具機之運動特性，也以c#撰寫此工具機的設計導引系統。針對原型機設計則利用ansys軟體分析其靜、動剛性與動柔度確保其變形量與共振時不會影響加工精度，並作敲擊測試驗證準確性，同時也利用D-H rule在將運動模型加入誤差源建立體積誤差模型，並透過誤差靈敏度分析，了解各誤差源之影響程度，並以MATLAB撰寫體積誤差分析系統協助機台設計者與使用者作有效益地設計改善或加工應用。由於機構特殊建立NC code轉換程式模組讓使用者可轉換一般CAM產生的NC模式成為本機台可用的加工程式，研究也在原型機最後進行精度校驗與實機切削，實驗結果證明能完成3D工件的製作。
並列摘要
Respond the small components manufacturing to have the 3D the complicated shape and the material applies the diversification need,Subtle non-MEMS manufacturing is an important modern technology,Micro tool machine is the key equipment of this technology.In Study design platform with co-planar multi-degree of freedom, Compared to the traditional organization which do not need to stack sequential manner, Which is based on three sets of oblique servo mechanism with swivel bearing, arranged in a ring-shaped array, By controlling the plural drive the stalk, can make the platform have freedom of X, Z and B in the case of three-axis do not stack. Platform organization is a ball screw and slide geometric triangle relate to put,So that the platform can be more finely the feed rate and better resolution.In addition, the research also effective to use of space on the base co-planar multi-freedom with double-column design, And install a spindle on it ,to make it has a Y axial freedom,Complete a horizontal micro machine tool with a co-plane muti-DOF plantform. Be in the research build up exercising the equation and analyze the exercise characteristic of tool machine,also with c # write this coplanar more freedom machine tool design guidance system.For the prototype design is the use of ansys software to analyze the static, dynamic rigidity and dynamic flexibility to ensure that the deformation and resonance precision not effect the process the accuracy,and for tapping test to verify the accuracy,Also use DH rule was added in the motion model error model error sources to establish volume,And through errors ensitivity analysis,Understandin the impact of various sources of error,And write MATLAB volume error analysis system to assist the machine designer and user make cost-effective design improvement or process applications.Since the establishment of NC code to convert agency-specific program module allows users to convert general CAM generated NC mode of the machine becomes available processing program,Finally, the study also prototype verify the accuracy and real machine cutting,Experimental results show that the positioning accuracy to within 1um,and to complete the 3D-workpiece production.