精密製造技術發展中,目前微小零組件之製造有3D複雜形狀之加工以及材料應用多樣化等需求,而精微工具機則為非微機電精微製造技術中的重要應用設備。研究中提出斜向驅動式平台結構,做為可變解析工具機之傳動媒介。斜向驅動式平台結構之傳動方法不同於傳統序列式機構,此機構主要是利用三角幾何運動轉換,將伺服馬達經由滾珠螺桿所推動之移動量經由三角形幾何關係縮減後,轉換成工作台進給量的方式,來使受驅動的平台可得到極細進給解析度,並連帶的將螺桿背隙以及螺距誤差等縮小。而機台則無需使用高規格的伺服元件,即能達到高解析度與高精度的微細加工要求。另一方面,相較於過去本研究室所提出的肘節式平台,此平台完全改善肘節式工具機的缺點,於行程中擁有固定的進給解析度,進而提供機台穩定的進給解析度,減少控制器進行加減速控制的負擔。機台的另一特色則為可依加工需求彈性調整斜驅角度,使機台可以不同進給解析度和工作行程滿足切削需求,獲得更佳加工效能,切削應用更彈性。並因此將此精微工具機命名為可變解析精微工具機。
The micro machine tool plays an important role in micro manufacturing, and the technology of Non-MEMS has become more and more important. In the study, present a new configuration design about a high-precision variable-resolution micro machine tool. To compare with toggle-type, new configuration has advantage of small table size and height, and slight variations in workspace’s resolution. For the optimal machine structure, modal analysis and dynamic compliance analysis were conducted with using CAE technology. The kinematic equation of the high-precision variable-resolution micro machine tool was derived and used to analyze the kinematic characteristics of the mechanism. Finally, the error model of the designed micro machine tool was derived and sensitivity analysis was conducted to explore the influence of the major error sources on machine’s accuracy.