肘節式精微工具機之機構設計改善及PC-based控制器內建式誤差補償系統之研究

Study of improvement in Mechanism design for toggle-type Mechine tool and build-in error compensation system for PC-based controller

李彥賢(Yen-Hsien Li)

指導教授 ： 黃健生

中原大學/工學院/機械工程研究所/碩士(2009年)

https://doi.org/10.6840/cycu200901600

摘要

CNC工具機為生產製造設備的主流之一，由於科技產品的演進及環保考量，工具機的加工需求逐漸朝向微型化、超精密方向發展。本論文主要係針對研究室所研發的第一代肘節式精微工具機進行精度提升研究，其中包含二部份:(1)第二代機台設計; (2)建立CNC控制器內建式誤差補償系統。針對機構設計改善方面，除了因應技轉廠商應用需求作三軸行程加大(100x100x100mm)設計外，也針對第一代肘節式精微工具機機構設計上缺失進行改良設計，使得第二代機台的穩定性及重現性精度都有顯著的提升。研究中採用有限元素法，對機台進行模態分析與動柔度分析，使機台結構具有輕量化、高動態剛性及抗振能力，以達到結構優化的目的。在內建式誤差償系統方面，結合研究室所發展的機上體積誤差補償系統與Element Free 誤差預測法，發展了可內建於PC-based控制器的體積誤差補償系統。此系統與控制器加工功能結合，可事先針對規劃的切削路徑進行誤差預測與補償，可更進一步提升精微工具機的加工精度。研究中也經由實機驗證，證實了第二代機台可達400nm的穩定定位精度，誤差補償也可有效再提升精微切削加工精度達30%。

關鍵字

結構優化 ； 誤差補償 ； 體積誤差預測 ； 精微工具機

並列摘要

CNC machine tools have been one of the major manufacturing equipments. Because evolution of high-tech product and consideration of environmental protection, development of high precision micro machine tools has become a important research field to meet the need of modern manufacturing industry. This study is mainly for the accuracy improvement for the first generation toggle-type micro machine tool. The research includes two parts: (1) design of the 2nd generation toggle-type micro machine tool; (2) development of a built-in volumetric error compensation system. In the machine design, in addition to extending the travel length (100x100x100mm) for the three axes, the machine structure was redesigned to for better stability and repeatability. Finite element method was used to conduct modal analysis and dynamic compliance analysis for the machine to obtain light structure with high static/dynamic stiffness. For the built-in error compensation system, the developed on-machine volumetric error measurement method and the element-free error prediction method were integrated to develop a system that can be implanted into the PC-based controller and integrated with the machining function of the controller to perform error prediction and compensation for a planned cutting trajectory. Verification experiments were also conducted in this study. The experimental results have shown that the designed 2nd generation micro machine can stably research 400nm positioning accuracy and the error compensation system can further enhance the machining accuracy of the machine for 30%.

並列關鍵字

micro machine tool ； volumetric error prediction ； error compensation

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