本文研究靜壓軸承之撓性工作臺動態特性,探討如何使用分析計算,分析靜壓軸承在不同承載力及不同受力位置下之結構共振特性,並加以探討設計參數之影響,在不同的供油壓力比、靜態承載力及動態承載力之設計條件下,分析並比較各參數對工作台的無因次位移之反應。 本文以振動學基礎架設四自由度撓性工作台之動態方程式,並應用雷諾方程式推導壓力分佈,進一步建立流量方程式,由流量平衡將其聯立求解後,得到工作台及節流器的壓力,將求出的壓力無因次化後代入作用力方程式,分別得到工作台及節流器之作用力,再將其分別代入工作台與節流器無因次動態方程式,並且聯立求解,得到靜壓軸承撓性工作台之動態方反應。
This paper studies the dynamic characteristics of flexible worktable mounted on hydrostatic bearings to explore how to use the analysis and calculation, the resonance characteristics of the hydrostatic bearing structure analysis at different load and different positions of the force, and to investigate the effect of design parameters, for different oil pressure ratio, static and dynamic load of the bearing capacity of the design conditions, analyze and compare the response of various parameters on the dimensionless displacement of the worktable. In this paper the dynamic equations of four degrees of freedom of a flexible workbench built on the basis of Vibration and apply Reynold equation to derived pressure distribution further establish the flow equation, solve these couple equations, which are solved for dimensionless recess region pressures on worktable and restrictors. The solutions of these coupled equations provide the static and dynamic amplitudes of worktable.