封閉式圓形靜壓平面支承使用不同型式節流器之工作台動態特性分析

Dynamic Analysis in Table Mounted on Closed-type Hydrostatic Plain Bearings with Different Restrictors

金鼎鈞(D.J. Jin)

指導教授 ： 康淵 ； 張永鵬

中原大學/工學院/機械工程學系/碩士(2008年)

https://doi.org/10.6840/cycu200900272

摘要

本文研究封閉式圓形靜壓平面之承 使用三種節流器之工作台動態特性分析，採用雙向與單向的薄膜式以及毛細管三種節流器。目的為了探討各種不同的節流器，在不同的供油壓力、薄膜剛度及節流係數等參數，並且工作台施以步階力、簡諧力之激振力，根據分析結果加以比較各參數的影響以及工作台之反應特性。
本文應用雷諾方程式所推導之壓力分佈形式，及假設油膜厚度建立流量方程式，求解流量平衡方程式，將其聯立求解後，得到工作台及節流器的壓力，將求出的壓力無因次化後代入作用力方程式，分別得到工作台及節流器之作用力，再將其分別代入工作台與節流器無因次動態方程式，並且聯立求解，得到閉式圓形工作台之動態反應。
本文共有六章，第一章為導論，說明靜壓支承系統與節流器之研究背景與相關發展；第二章為圓形工作台分析，建立圓形工作台動態方程式，；第三章為為節流器的理論分析，建立節流器之動態方程式；第四章為流量平衡及動態方程式求解，利用流量平衡方程式聯立求解各油腔的壓力，代入工作台及節流器的動態方程式，求解得到工作台之動態反應；第五章為分析結果及討論，探討在不同的節流參數及激振力下，並比較三種節流器之動態反應;第六章為結論，探討在相同磨潤參數下，各種節流器之優缺點。

關鍵字

薄膜剛度 ； 封閉式滑軌 ； 圓形工作台 ； 步階反應 ； 薄膜節流器

並列摘要

This thesis studies the dynamic characteristics in table mounted on close-type hydrostatic plain bearing with three restrictors, which are single-chamber and double chamber of membrane type restrictions and capillary restriction. With various supply pressure, various membrane stiffness and restrictor parameter, worktable under step force and harmonic force are analyzed.
On the basis of Reynold equation, the pressure distribution are formulated for the continuity equations of lubricant flow, solve these couple equations, which are solved for dimensionless recess region pressures on worktable and restrictors. The solutions of these coupled equations provide the static and dynamic amplitudes of worktable.
There are six chapters in this thesis. The first chapter is the introduction which introduce the study background and correlative developments of the hydrostatic slideways, membrane and capillary restrictors. The second chapter is analysis for the worktable of formulations of equations. The continuity equations are used to determine pressures which give bearing dynamic. The third chapter is analysis for the restrictors of formulations of equations. The continuity equations are used to determine pressures which give restrictor dynamic. The fourth chapter is solved the equations of flow equilibrium. The continuity equations are used to determine pressures which give bearing and membrane dynamics. The fifth chapter present characteristic analyses of the close-type hydrostatic plain bearing with three restrictors. The sixth chapter is the conclusion of the thesis.

並列關鍵字

step response ； membrane stiffness ； close-type hydrostatic slideway ； circular worktable ； membrane-type restrictor

參考文獻

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[14] 趙家成, “開式靜壓滑軌之特性分析與驗證,” 中原大學機械工程學系碩士論文, 2004.

[15] 李棋富, “閉式靜壓滑軌之特性分析與最佳化,” 中原大學機械工程學系碩士論文, 2004.

[16] 吳奎漢, “閉式靜壓滑軌使用薄膜節流器之動態特性分析,” 中原大學機械工程學系碩士論文, 2006.

[1] Malanoski, S. B. and Loeb, A. M., “The Effect of the Method Compensation on Hydrostatic Bearing Stiffness,” Transaction of the ASME, Journal of Basic Engineering, Vol. 83, No. 2, pp. 179-187, 1961.