本文研究自補償靜壓軸承之工作台之靜態及動態特性,探討自補償靜壓軸承設計參數之影響。靜態部分,探討節流部位設計參數,在不同的有效面積比、節流參數比及節流島高度比之設計參數下,分析無因次工作台位移對無因次承載及無因次剛度的靜態反應,並針對節流島高度比的變化加以分析討論。動態部分探討不同的黏度比、供油壓力、靜態承載力、動態承載力之設計參數,對工作台施加步階力及簡諧力,分析並比較個參數對工作台的反應。 本文應用雷諾方程式所推導壓力分佈,假設油膜厚度並建立流量方程式,求解流量平衡式,將其聯立求解後,得到油墊部及節流部的工作壓力,將求出的壓力無因次化後代入作用力方程式,分別得到油墊部及節流部之作用力,再將其分別代入油墊部與節流部無因次動態方程式,並且聯立求解,得到自補償靜壓軸承工作台之動態方反應。
The static and dynamic characteristics of worktable mounted on hydrostatic bearings using self-compensation are investigated in this study. For static characteristics the influences of design parameters of hydrostatic bearings are investigated. With various ratio of effective area of both pads, ratio of restrictor parameter, ratio of height of island and viscosity ratio. Dimensionless load capacity and dimensionless static stiffness versus displacement ratio of worktable and are obtained by numerical analysis on the influences of change in the ratio of island height. For dynamic characteristics the influences of supply pressure, step load and load on worktable responses harmonic are investigated. On the basis of Reynolds equation, the pressure distributions are formulated for the continuity equations of lubricant flow, which are solved to give dimensionless pressures of recess and restrictor exits and responses of worktable.